Method of making a plurality of flow sensors
AssigneeHoneywell International Inc.
InventorsAravind Padmanabhan, Ulrich Bonne, Michael G. Marchini
Life of this patent
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Abstract
A method of making a plurality of flow sensors is provided, each flow sensor having a substrate with a sensing element and flow channel aligned over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is aligned by one or more guide elements formed in an alignment layer. The flow channel across the sensing area is accurately and precisely aligned due to the guide elements provided at the wafer-level, facilitating reliable, low-cost, and consistent results among multiple flow sensors. The flow sensor is adapted for use in harsh environments.
Claims19
A method of making a plurality of flow sensors each having a flow channel aligned with a sensing element, the method comprising:
- providing a substrate having a plurality of sensing elements aligned in a pattern;
- depositing a polymer alignment layer onto the substrate;
- forming by photolithography a plurality of guide elements in the alignment layer, wherein each guide element is aligned adjacent the sensing element;
- dicing the substrate into a plurality of chips, wherein each chip has the sensing element and at least one guide element.
A method of making a plurality of flow sensors each having a flow channel aligned over a sensing element, the method comprising:
- (a) providing a substrate having a plurality of sensing elements aligned in a pattern;
- (b) depositing an alignment layer onto the substrate;
- (c) forming a plurality of guide elements in the alignment layer, wherein at least one guide element is aligned adjacent each sensing element;
- (d) dicing the substrate to form a plurality of pieces, each piece having a sensing element and at least one guide element;
- and
- (e) placing a molded element containing a flow channel on the guide element of each piece such that the flow channel is aligned over the sensing element.
Dependencies are inferred from the claim text.