Apparatus and method for semiconductor wafer bumping via injection molded solder
AssigneeSuss Microtec Inc
InventorsHale Johnson, Wilhelm Lapointe
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AssigneeSuss Microtec Inc
InventorsHale Johnson, Wilhelm Lapointe
Estimating the term…
An improved apparatus for positioning and aligning a patterned surface of a semiconductor structure directly opposite to solder filled patterned mold cavities of a mold structure includes a pattern based alignment too including means for identifying a mold training pattern image and a semiconductor training pattern image on a training mold structure and a training semiconductor structure, respectively, means for training the alignment tool with the training pattern images, means for storing the alignment tool trained position, means for identifying a mold pattern image and a semiconductor pattern image on the mold structure and the semiconductor structure matching the mold training pattern image and the semiconductor training pattern image, respectively, and means for aligning the identified mold pattern image with the semiconductor pattern image.
A method for forming solder bumps onto semiconductor structures comprising:
A method for positioning and aligning a patterned surface of a first semiconductor structure directly opposite to a patterned surface of a second semiconductor structure comprising performing a pattern based alignment comprising:
Dependencies are inferred from the claim text.