Multipole coils
AssigneeCEOS Corrected Electron Optical Systems GmbH
InventorsJoachim Zach, Matthias Kallenbach
Life of this patent
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Abstract
Multipole coils (1, 2, 3, 4, 5, 6) for influencing particle beams have at least two coils (1, 2) which concentrically enclose an imaginary axis (10), wherein a winding (7) made from a flexible circuit board (8) is formed by means of conducting paths (9) disposed thereon for each coil (1, 2, 3, 4, 5, 6) and the circuit boards (8) are rolled into at least one circuit board layer (11, 12, 13, 14). Multipole coils of this kind (1, 2, 3, 4, 5, 6) are utilized for aberration correction in particle optics, wherein the windings (7) of the multipole coils (1, 2, 3, 4, 5, 6) form windows (16) whose width in the peripheral direction is chosen in such a fashion that no secondary interfering fields occur and whose length in the axial direction corresponds at least to its width.
Claims29
A multipole coils configuration for influencing particle beams, the multipole coils configuration comprising:
- a first coil, said first coil having at least one first winding defined by strip conductors disposed on a flexible printed circuit board, said first winding forming a first window having a first width in a peripheral direction and a first length in an axial direction, said first length being greater than or equal to said first width;
- and
- at least one second coil, said second coil having at least one second winding defined by strip conductors disposed on said flexible printed circuit board, said second winding forming a second window having a second width in a peripheral direction and a second length in an axial direction, said second length being greater than or equal to said second width, wherein said first and said second coils are disposed to concentrically enclose an imaginary axis and said printed circuit board is structured to roll up into at least one printed circuit board layer, wherein each of said first and said second widths is dimensioned to avoid generation of secondary interfering fields.
Dependencies are inferred from the claim text.