Container for precision substrate
AssigneesZeon Corporation, Tadahiro Ohmi
InventorsToshihiko Jimbo, Toshihide Murakami, Tadahiro Ohmi
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Abstract
A container for precision substrate having one or more component formed by molding a thermoplastic resin, characterized in that the component satisfies characteristics [1] and [2] below. [1] When being brought to contact ultra high purity argon gas (impurity concentration: 1 ppb or less) at 25° C. having a flow rate of 1.2 L/min., a water amount in said argon gas after 300 minutes is 30 ppb or less per a surface area 1 cm2 of the component. [2] When being placed in the air at 100° C., an increase amount of organics in the air in 300 minutes is 150 ng or less per weight 1 g of the component. According to the container, demands for low contamination can be satisfied.
Claims14
A container for precision substrate having one or more components formed by molding a thermoplastic resin,
- wherein the thermoplastic resin is a polymer resin containing alicyclic structure,
- and the polymer resin containing alicyclic structure has a melt index of 2 to 100 g/10 min., and
- the melt index is a value measured at 280° C. based on the JIS-K7210,
- characterized in that said component satisfies characteristics [1] and [2] below:
- [1] When being brought to contact ultra high purity argon gas (impurity concentration:
- 1 ppb or less) at 25° C. having a flow rate of 1.2 L/min., a water amount in said argon gas after 300 minutes is 30 ppb or less per a surface area 1 cm2 of the component;
- and
- [2] When being placed in the air at 100° C., an increase in the amount of organics in the air in 300 minutes is 150 ng or less per weight 1 g of the component.
Dependencies are inferred from the claim text.