US 7,777,876 B2 · Inspection method and inspection device

Abstract

An inspection method and an inspection device, or apparatus each capable of conducting composition analysis of a defect detected by elastic or stokes scattered light, an inspection surface or defect on the surface of the inspection surface, or a defect on the surface of the inspection object and its internal composition. A surface inspection method for optically detecting elastic or stokes scattering or inelastic or anti-stokes scattered light from inside the surface of the inspection object, for detecting existence of defects of the inspection object and features of the defects, for detecting positions of the detected defects on the surface of the inspection object, classifying and analyzing the detected defects in accordance with their features on the basis of the positions of the defects and the features of the defects or the classification result of the defects.

Claims19

Dependent claims

An inspection method comprising the steps of:

detecting either discretely or simultaneously elastic or stokes scattered light and inelastic or anti-stokes scattered light occurring from a surface and an inside of an inspection object by irradiation of inspection light by deviating them time-wise from each other;
detecting the existence/absence of a defect of the surface and the feature of said defect by said elastic or stokes scattered light detected;
detecting the position of said defect on the surface;
classifying said detected defect in accordance with the feature;
and
conducting an analysis of said defect by said inelastic or anti-stokes scattered light on the basis of the position of said defect, the feature of said defect or the classification result of said defect.

3 more elements

Dependencies are inferred from the claim text.

Inspection method and inspection device

Life of this patent

Inspection method and inspection device

Life of this patent

Abstract

Claims19