System and method for moving a component through a setpoint profile, lithographic apparatus and device manufacturing method

A lithographic projection apparatus arranged to project a pattern from a patterning device onto a substrate, comprising:

• (a) a movable support configured to hold said patterning device;
• and
• (b) a system configured to move said movable support in accordance with a setpoint profile that includes a plurality of target states of said movable support, each of said plurality of target states to be substantially attained at one of a corresponding sequence of target times, said system comprising
• (i) a displacement device configured to move said movable support according to said setpoint profile;
• (ii) a data storage device that includes a library of feedforward data;
• (iii) a signal generator configured to (1) identify a plurality of time segments of said setpoint profile that correspond to entries in said library of feedforward data, and (2) access said entries in order to construct a feedforward signal;
• and
• (iv) a feedforward control system configured to control said displacement device based on said feedforward signal that is constructed by said signal generator.

A lithographic projection apparatus arranged to project a pattern from a patterning device onto a substrate, comprising:

• (a) a movable support configured to hold said substrate;
• and
• (b) a system configured to move said movable support in accordance with a setpoint profile that includes a plurality of target states of said movable support, each of said plurality of target states to be substantially attained at one of a corresponding sequence of target times, said system comprising
• (i) a displacement device configured to move said movable support according to said setpoint profile;
• (ii) a data storage device that includes a library of feedforward data;
• (iii) a signal generator configured to (1) identify a plurality of time segments of said setpoint profile that correspond to entries in said library of feedforward data, and (2) access said entries in order to construct a feedforward signal;
• and
• (iv) a feedforward control system configured to control said displacement device based on said feedforward signal that is constructed by said signal generator.

A method of moving a component in accordance with a setpoint profile that includes a plurality of target states of said component, each of said plurality of target states to be substantially attained at one of a corresponding sequence of target times, said method comprising:

• comparing a plurality of time segments of said setpoint profile with entries in a library of feedforward data;
• identifying time segments for which feedforward data exist in said library;
• retrieving the feedforward data for the identified time segments;
• constructing at least part of a feedforward signal using said retrieved feedforward data;
• and
• controlling a movement of said component according to said setpoint profile based on said feedforward signal.

A device manufacturing method comprising:

• (a) projecting a pattern from a patterning device onto a substrate;
• and
• (b) moving a movable support that is configured to hold said patterning device in accordance with a setpoint profile that includes a plurality of target states of said movable support, each of said plurality of target states to be substantially attained at one of a corresponding sequence of target times, said moving comprising
• (i) comparing a plurality of time segments of said setpoint profile with entries in a library of feedforward data;
• (ii) identifying time segments for which feedforward data exists in said library;
• (iii) retrieving the feedforward data for the identified time segments;
• (iv) constructing at least part of a feedforward signal using said retrieved feedforward data;
• and
• (v) controlling a movement of said movable support according to said setpoint profile based on said feedforward signal.

A device manufacturing method comprising:

• (a) projecting a pattern from a patterning device onto a substrate;
• and
• (b) moving a movable support configured to hold said substrate in accordance with a setpoint profile that includes a plurality of target states of said movable support, each of said plurality of target states to be substantially attained at one of a corresponding sequence of target times, said moving comprising
• (i) comparing a plurality of time segments of said setpoint profile with entries in a library of feedforward data;
• (ii) identifying time segments for which feedforward data exists in said library;
• (iii) retrieving the feedforward data for the identified time segments;
• (iv) constructing at least part of a feedforward signal using said retrieved feedforward data;
• and
• (v) controlling the movement of said movable support according to said setpoint profile based on said feedforward signal.