Fast-scanning SPM and method of operating same

A method of operating a scanning probe microscope (SPM) comprising:

• actuating a piezoelectric actuator assembly to move a probe of the SPM past a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and moving the probe in a z direction under control of a piezoelectric z actuator;
• measuring motion of the probe using a sensing light beam and a detector;
• moving at least one lens so that the sensing beam at least substantially follows the scanning motion of the probe;
• and
• controlling probe-sample interaction with a force control bandwidth of at least 10 kHz;
• and
• at least one of storing, transmitting, and displaying at least one of the measurement and information derived from the measurement.

A scanning probe microscope (SPM) comprising:

• a piezoelectric actuator assembly that moves probe of the SPM past a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec;
• a piezoelectric actuator that moves the probe in a z direction;
• means for measuring motion of the probe using a sensing light beam and a detector;
• means for moving at least one lens so that the sensing beam at least substantially follows the scanning motion of the probe;
• and
• means for controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec.

A scanning probe microscope (SPM) comprising:

• a scanner including 1) a piezoelectric actuator assembly that moves a probe of the SPM past a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and 2) a piezoelectric actuator that moves the probe in a z direction;
• a sensing light beam and detector that measure motion of the probe;
• at least one lens disposed between the scanning light beam and the sample, the lens being movable to cause the sensing beam to at least substantially follow the scanning motion of the probe;
• and
• a controller that controls probe-sample interaction with a force control slew rate of at least 1 mm/sec.