Back to results
US 7,767,969 B2Granted
Method and apparatus for measuring spectroscopic absorbance
AssigneeSumco Techxiv Corporation
InventorsKiyoshi Nagai, Harumi Shibata, Sayaka Hamaguchi
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeSumco Techxiv Corporation
InventorsKiyoshi Nagai, Harumi Shibata, Sayaka Hamaguchi
Estimating the term…
An object of the present invention is to provide a spectroscopic method and an apparatus which can measure a trace element accurately with high sensitivity. In order to achieve this object, for example, in Fourier transformation infrared spectroscopy (FT-IR), a reference spectrum and a measurement spectrum including an impurity spectrum are measured in order to obtain a differential spectrum comprising the impurity spectrum and a flat baseline, correction including a frequency shift of the reference spectrum before calculating a differential spectrum, is performed on the reference spectrum. This makes it possible to remove baseline deformation due to phonon absorbance of silicon included in the conventional differential spectrum, and to obtain an infrared absorption spectrum of the substitutional carbon with high accuracy and high sensitivity.
A method of measuring spectroscopic absorbance, in differential spectroscopy, for obtaining only a spectroscopic absorption spectrum of a measurement component from a sample spectrum of a measurement sample and from a reference spectrum of a reference sample, the sample spectrum having spectroscopic absorbance of a background component in a frequency domain of spectroscopic absorbance of the measurement component and in a frequency domain overlapping with the spectroscopic absorbance of the measurement component, and the reference spectrum substantially not including the measurement component but having the spectroscopic absorbance of the background component,
A method of measuring spectroscopic absorbance, in differential spectroscopy, for obtaining only a spectroscopic absorption spectrum of a measurement component from a sample spectrum of a measurement sample and from a reference spectrum of a reference sample, the sample spectrum having spectroscopic absorbance of a background component in a frequency domain of spectroscopic absorbance of the measurement component and in a frequency domain overlapping with the spectroscopic absorbance of the measurement component, and the reference spectrum not substantially including the measurement component but having the spectroscopic absorbance of the background component,
A computer program on a non-transitory computer readable medium, to cause a computer to perform the steps of:
An apparatus for measuring spectroscopic absorbance, comprising:
Dependencies are inferred from the claim text.