US 7,767,270 B1 · Selective functionalization of carbon nanotubes based upon distance traveled

Abstract

Method and system for functionalizing a collection of carbon nanotubes (CNTs). A selected precursor gas (e.g., H2 or NH3 or NF3 or F2 or CF4 or CnHm) is irradiated to provide a cold plasma of selected target particles, such as atomic H or F, in a first chamber. The target particles are directed toward an array of CNTs located in a second chamber while suppressing transport of ultraviolet radiation to the second chamber. A CNT array is functionalized with the target particles, at or below room temperature, to a point of saturation, in an exposure time interval no longer than about 30 sec. The predominant species that are deposited on the CNT array vary with the distance d measured along a path from the precursor gas to the CNT array; two or three different predominant species can be deposited on a CNT array for distances d=d1 and d=d2>d1 and d=d3>d2.

Claims33

Dependent claims

A method for functionalizing a collection of carbon nanotubes (CNTs), the method comprising:

irradiating a precursor gas to provide selected first target particles that contain N in a first chamber having a first selected sub-Torr chamber pressure p1;
providing a collection of first target CNTs on a substrate in a second chamber having a second selected sub-Torr pressure p2, where p2 is not more than about 0.01·p1;
providing a particle communication mechanism that allows transport of at least a portion of the first target particles from the first chamber to the second chamber;
allowing at least one first target particle to react with and become chemically attached to at least one first target CNT in the second chamber;
and
choosing a distance of transport d, of the at least one first target particle that is irradiated in the first chamber to at least one first target CNT in the second chamber, to lie in a first transport distance range, d<d1, where d1 is selected to increase a likelihood that the reaction product of the at least one first target particle and the at least one first target CNT will be one of a group of one or more target reaction products that differs from the first target CNT.

3 more elements

A method for functionalizing a collection of carbon nanotubes (CNTs), the method comprising:

irradiating a precursor gas to provide selected first target particles that contain at least one of NFx, NClx, NBrx, NIx, and NAtx (x=1, 2, 3) in a first chamber having a first selected sub-Torr chamber pressure p1;
providing a collection of CNTs on a substrate in a second chamber having a second selected sub-Torr pressure p2, where p2 is not more than about 0.01·p1;
providing a particle communication mechanism that allows transport of at least a portion of the first target particles from the first chamber to the second chamber;
allowing at least one of the first target particles to become chemically attached to at least one of the first target CNT in the second chamber;
and
choosing a distance of transport d, of the at least one first target particle that is irradiated in the first chamber to a first target CNT in the second chamber, to lie in a first transport distance range, d<d1, where d1 is selected to increase a likelihood that the reaction product of the first target particle and the first target CNT will be one of a group of at least one target reaction products that differs from the first target CNT.

3 more elements

Dependencies are inferred from the claim text.

Selective functionalization of carbon nanotubes based upon distance traveled

Life of this patent

Selective functionalization of carbon nanotubes based upon distance traveled

Life of this patent

Abstract

Claims33