High temperature capacitive static/dynamic pressure sensors
AssigneeRosemount Aerospace Inc.
InventorShuwen Guo
Life of this patent
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Abstract
Disclosed is a capacitive pressure probe for high temperature applications, such as for use in a gas turbine engine. The capacitive probe or pressure sensor of the present invention includes, inter alia, a sensor housing that defines an interior sensing chamber having a pressure port and an interior reference chamber positioned adjacent to a sensing electrode. The reference chamber is separated from the sensing chamber by a deflectable diaphragm made from Haynes 230 alloy, wherein the deflection of the diaphragm in response to an applied pressure in the sensing chamber corresponds to a change in capacitance value detected by the sensing electrode.
Claims24
A capacitive pressure sensor comprising:
- a sensor housing defining an interior sensing chamber having a pressure port and an interior reference chamber positioned adjacent to a sensing electrode, wherein the reference chamber is separated from the sensing chamber by a deflectable diaphragm made from Haynes 230 alloy, wherein the deflection of the diaphragm in response to an applied pressure in the sensing chamber corresponds to a change in capacitance value detected by the sensing electrode.
A capacitive dynamic pressure microphone comprising:
- a) a sensor housing defining an interior sensing chamber having an open pressure port and an enclosed interior reference chamber accommodating a sensing electrode;
- b) a deflectable diaphragm separating the reference chamber from the sensing chamber and spaced apart from the sensing electrode by a predetermined gap distance;
- and
- c) a venting conduit providing communication between the sensing chamber and the reference chamber for maintaining a balanced static background pressure therebetween, and configured so that a change in pressure in the sensing chamber leads ahead of a corresponding change in pressure in the reference chamber by a predetermined time period, and wherein a pressure differential between the sensing chamber and the reference chamber over said time period causes a corresponding change in the deflection of the diaphragm over said time period, causing a corresponding change in the gap distance over said time period, resulting in a corresponding change in the capacitance value detected by the sensing electrode over said time period.
A capacitive dynamic pressure microphone comprising:
- a) sensor housing including a mounting section, a diaphragm section and an electrode support section, the mounting section defining an open pressure port which communicates with an interior sensing chamber formed in the diaphragm section that terminates at a deflectable diaphragm, wherein the electrode support section accommodates a sensing electrode and defining a reference chamber, and wherein the deflectable diaphragm separates the reference chamber from the sensing chamber and is spaced apart from the sensing electrode by a predetermined gap distance;
- and
- b) a venting conduit providing communication between the sensing chamber and the reference chamber for maintaining a balanced static background pressure therebetween, and configured so that a change in pressure in the sensing chamber leads ahead of a corresponding change in pressure in the reference chamber by a predetermined time period.
Dependencies are inferred from the claim text.