Apparatus for testing electronic devices
AssigneeAehr Test Systems
InventorsDonald P. Richmond, II, Kenneth W. Deboe, Frank O. Uher, Jovan Jovanovic, Scott E. Lindsey, Thomas T. Maenner, Long V. Vu
Life of this patent
Estimating the term…
Loading patent…
AssigneeAehr Test Systems
InventorsDonald P. Richmond, II, Kenneth W. Deboe, Frank O. Uher, Jovan Jovanovic, Scott E. Lindsey, Thomas T. Maenner, Long V. Vu
Estimating the term…
An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.
A contactor assembly, comprising:
A contactor assembly, comprising:
A contactor assembly, comprising:
A contactor assembly, comprising:
A contactor assembly, comprising:
A contactor assembly, comprising:
A cartridge, comprising:
A cartridge, comprising:
A connector system, comprising:
A connector system, comprising:
An engager comprising:
A cartridge, comprising:
A cartridge, comprising:
A cartridge, comprising:
Dependencies are inferred from the claim text.