Waveform generator for microdeposition control system
AssigneeUlvac, Inc.
InventorsCharles O. Edwards, David Albertalli, James Middleton, George Fellingham
Life of this patent
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AssigneeUlvac, Inc.
InventorsCharles O. Edwards, David Albertalli, James Middleton, George Fellingham
Estimating the term…
A microdeposition system and method includes a head with a plurality of nozzles. A controller generates nozzle firing commands that selectively fire the nozzles to create a desired feature pattern. Configuration memory stores voltage waveform parameters that define a voltage waveform for each of the nozzles. A digital to analog converter (DAC) sequencer communicates with the configuration memory and the controller and outputs a first voltage waveform for a first nozzle when a nozzle firing command for the first nozzle is received from the controller. A resistive ladder DAC receives the voltage waveforms from the DAC sequencer. An operational amplifier (opamp) communicates with the resistive ladder DAC and amplifies the voltage waveforms. The nozzles fire droplets when the voltage waveforms received from the opamp exceed a firing threshold of the nozzle.
A microdeposition system that deposits droplets of fluid material on a substrate, comprising:
A method for firing droplets of fluid material in a microdeposition system, comprising:
Dependencies are inferred from the claim text.