Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer program

A control system configured to operate a lithographic processing machine capable of performing a plurality of tasks and configured to have a plurality of states over time, each of the plurality of tasks being associated with a corresponding beginning state of the plurality of states, in which the machine is configured to initiate the task, and a corresponding end state of the plurality of states, in which the machine is configured to complete the task, the control system comprising:

• a state register configured to represent a state of the machine at a corresponding time;
• an update mechanism configured to update said state register according to a change in the state of the machine over time;
• a task database configured to store information relating each of the plurality of tasks with its corresponding beginning and end states;
• a sequence construction mechanism configured to construct, based on the task database, a plurality of possible sequences of tasks;
• a search engine configured to select one among said plurality of possible sequences that starts from a given beginning state of the machine and results in a desired end state of the machine and configured to select at least one among the group consisting of (A) said constructing a plurality of possible sequences and (B) said selecting one among said plurality of possible sequences comprises detecting and rejecting sequences that loop;
• and
• a controller configured to control said machine to perform the selected possible sequence.

A lithographic processing machine capable of performing a plurality of tasks and configured to have a plurality of states over time, each of the plurality of tasks being associated with a corresponding beginning state of the plurality of states, in which the machine is configured to initiate the task, and a corresponding end state of the plurality of states, in which the machine is configured to complete the task, said machine comprising a control system configured to operate the machine, the control system comprising:

• a state register configured to represent a state of the machine at a corresponding time;
• an update mechanism configured to update said state register according to a change in the state of the machine over time;
• a task database configured to store information relating each of the plurality of tasks with its corresponding beginning and end states;
• a sequence construction mechanism configured to construct, based on the task database, a plurality of possible sequences of tasks;
• a search engine configured to select one among said plurality of possible sequences that starts from a given beginning state of the machine and results in a desired end state of the machine and configured to select at least one among the group consisting of (A) said constructing a plurality of possible sequences and (B) said selecting one among said plurality of possible sequences comprises detecting and rejecting sequences that loop;
• and
• a controller configured to control said machine to perform the selected possible sequence.

A lithographic processing cell comprising:

• a plurality of lithographic processing machines, at least one of said lithographic processing machines being capable of performing a plurality of tasks and configured to have a plurality of states over time, each of the plurality of tasks being associated with a corresponding beginning state of the plurality of states, in which the machine is configured to initiate the task, and a corresponding end state of the plurality of states, in which the machine is configured to complete the task;
• and
• a control system configured to operate said at least one of the plurality of lithographic processing machines, the control system comprising:
• a state register configured to represent a state of the machine at a corresponding time;
• an update mechanism configured to update said state register according to a change in the state of the machine over time;
• a task database configured to store information relating each of the plurality of tasks with its corresponding beginning and end states;
• a sequence construction mechanism configured to construct, based on the task database, a plurality of possible sequences of tasks;
• a search engine configured to select one among said plurality of possible sequences that starts from a given beginning state of the machine and results in a desired end state of the machine and configured to select at least one among the group consisting of (A) said constructing a plurality of possible sequences and (B) said selecting one among said plurality of possible sequences comprises detecting and rejecting sequences that loop;
• and
• a controller configured to control said machine to perform the selected possible sequence, wherein said plurality of lithographic processing machines includes a lithographic apparatus and a track unit.

A data storage medium having machine-executable instructions, said instructions describing a method of operating a lithographic processing machine capable of performing a plurality of tasks and configured to have a plurality of states over time, each of the plurality of tasks being associated with a corresponding beginning state of the plurality of states, in which the machine is configured to initiate the task, and a corresponding end state of the plurality of states, in which the machine is configured to complete the task, the method comprising:

• maintaining a state register representing a state of the machine at a particular time;
• providing a task database relating each of the plurality of tasks with its corresponding beginning and end states;
• based on the task database, constructing a plurality of possible sequences of tasks;
• selecting one among said plurality of possible sequences that starts from a given beginning state of the machine and results in a desired end state of the machine;
• selecting at least one among the group consisting of (A) said constructing a plurality of possible sequences and (B) said selecting one among said plurality of possible sequences comprises detecting and rejecting sequences that loop;
• and
• controlling the machine to perform the selected possible sequence.

A method of operating a lithographic processing machine capable of performing a plurality of tasks and configured to have a plurality of states over time, each of the plurality of tasks being associated with a corresponding beginning state of the plurality of states, in which the machine is configured to initiate the task, and a corresponding end state of the plurality of states, in which the machine is configured to complete the task, the method comprising:

• based on a task database that relates each of the plurality of tasks with its corresponding beginning and end states, constructing a plurality of possible sequences of tasks;
• selecting one among said plurality of possible sequences that starts from a given beginning state of the machine and results in a desired end state of the machine;
• and
• selecting at least one among the group consisting of (A) said constructing a plurality of possible sequences and (B) said selecting one among said plurality of possible sequences comprises detecting and rejecting sequences that loop.