Back to results
US 7,755,454 B2Granted
Micro-electromechanical device
AssigneeSony Corporation
InventorsMasahiro Tanaka, Takashi Kinoshita, Keitaro Yamashita
Life of this patent
Estimating the term…
Abstract
Provided is a micro-electromechanical device capable of processing an electric signal in the high frequency region by a simple device structure. The micro-electromechanical device is formed, including an oscillator element having a plurality of electrodes disposed on a substrate and a beam facing the electrodes to oscillate by electrostatic drive. An input/output of a high frequency signal is applied to one of the combinations of the electrodes and the beam.
Claims20
A micro-electromechanical device, comprising:
- an oscillator element including:
- a plurality of electrodes formed on a substrate;
- and
- a beam facing the electrodes and configured to oscillate by means of an electrostatic drive,
- wherein,
- when a high frequency signal is applied to one of the plurality of electrodes, and a reference signal is applied to the beam, an output signal is output from another one of the plurality of electrodes, the output signal having a differential frequency between the high frequency signal and the reference signal.
3 more elements
A micro-electromechanical device, comprising:
- an oscillator element;
- the oscillator element including
- a plurality of electrodes formed on a substrate;
- and
- a beam facing the electrodes and configured to oscillate by means of electrostatic drive,
- characterized in that an input/output of a high frequency signal is applied to one of combinations of the plurality of electrodes and the beam, and
- characterized in that portions of the beam, exclusive of portions facing the electrodes and portions serving as wiring for applying a bias voltage and for transmitting signals, are formed of an insulator.
4 more elements
Dependencies are inferred from the claim text.