# US 7,746,462 B2 · Inspection systems and methods for extending the detection range of an inspection system by forcing the photodetector into the non-linear range

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- Number: US 7,746,462 B2
- Document ID: US7746462B2
- Status: Granted
- Kind: B2
- Application number: 11/751,293
- Filed: 2007-05-21
- Published: 2008-11-27
- Granted: 2010-06-29
- Earliest claimed: 2007-05-21
- Assignees: KLA-Tencor Technologies Corporation
- Inventors: Zhongping Cai; Alexander Slobodov; Anatoly Romanovsky; Christian H. Wolters
- Web page: https://patentgrep.com/patent/US7746462B2

## CPC

- G01N 21/9501: {Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20)}
- G01N 21/8851: {Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges (G01N21/8806 and G01N21/93 - G01N21/95692 take precedence; optical measurement of dimensions G01B11/00; optical scanning G02B26/10; image transformation G06T3/00; computerised image enhancement G06T5/00; image processing per se for flaw detection G06T7/0002)}
- H01J 43/18: Electrode arrangements using essentially more than one dynode
- H01J 43/30: Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- G01N 2201/1241: Multirange
- G01N 2201/12769: and adjusting controls, e.g. zero and 100 %
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

An inspection system and method is provided herein for increasing the detection range of the inspection system. According to one embodiment, the inspection system may include a photodetector having a plurality of stages, which are adapted to convert light scattered from a specimen into an output signal, and a voltage divider network coupled for extending the detection range of the photodetector (and thus, the detection range of the inspection system) by saturating at least one of the stages. This forces the photodetector to operate in a non-linear manner. However, measurement inaccuracies are avoided by calibrating the photodetector output to remove any non-linear effects that may be created by intentionally saturating the at least one of the stages. In one example, a table of values may be generated during a calibration phase to convert the photodetector output into an actual amount of scattered light.

## Claims

### Claim 1

An inspection system, comprising:
an illumination subsystem configured for directing light to a specimen;
a detection subsystem configured for detecting light scattered from the specimen, wherein the detection subsystem comprises:
a photodetector having a plurality of stages coupled for receiving and converting the scattered light into an output signal; and
a voltage divider network coupled to extend a detection range of the photodetector by intentionally saturating at least one of the stages used to generate the output signal; and
a processor configured for calibrating the output signal to remove non-linear effects created by saturating the at least one of the stages, and using the calibrated output signal to detect a feature, defect or light scattering property of the specimen.

### Claim 2 (depends on 1)

The inspection system as recited in claim 1, wherein the voltage divider network is configured for generating:
a first potential difference between each of a first set of the stages nearest to an input of the photodetector;
a second potential difference, substantially higher or lower than the first potential difference, between each of a second set of the stages nearest to an output of the photodetector; and
a third potential difference, substantially lower than the first potential difference, between two adjacent stages within the first and second sets.

### Claim 3 (depends on 2)

The inspection system as recited in claim 2, wherein the second potential difference is selected from a range comprising approximately 50-400% of the first potential difference.

### Claim 4 (depends on 2)

The inspection system as recited in claim 2, wherein the third potential difference is selected from a range comprising approximately 5-50% of the first potential difference.

### Claim 5 (depends on 2)

The inspection system as recited in claim 2, wherein the first and second sets of stages are configured to provide a desired amount of detection range and a desired amount of detection resolution.

### Claim 6 (depends on 5)

The inspection system as recited in claim 5, wherein a maximum amount of detection range is provided by including a majority of the stages in the first set and relatively few stages in the second set.

### Claim 7 (depends on 6)

The inspection system as recited in claim 6, wherein the detection resolution is increased at the expense of the detection range by increasing the number of stages within the second set and decreasing the number of stages within the first set.

### Claim 8 (depends on 1)

The inspection system as recited in claim 1, wherein the output signal is calibrated by using a pre-computed table of values adapted to correlate the output signal produced by the photodetector to an actual amount of scattered light.

### Claim 9 (depends on 8)

The inspection system as recited in claim 8, wherein the actual amount of scattered light is used by the processor to determine a size of the detected feature, defect or light scattering property of the specimen.

### Claim 10

A method for increasing a detection range of an inspection system comprising a photodetector having a plurality of stages, which are adapted to convert light scattered from a specimen into an output signal, wherein the method comprises:
selecting a potential distribution, which when supplied to the photodetector, intentionally saturates at least one of the stages used to generate the output signal;
generating a table of values correlating a range of photodetector output signals to actual amounts of scattered light to remove non-linear effects created by intentionally saturating the at least one of the stages;
using the table of values to calibrate a subsequent output signal generated by the photodetector.

### Claim 11 (depends on 10)

The method as recited in claim 10, wherein the step of selecting comprises:
selecting a first potential difference to be applied between each of a first set of the stages nearest to an input of the photodetector;
selecting a second potential difference, substantially higher or lower than the first potential difference, to be applied between each of a second set of the stages nearest to an output of the photodetector; and
selecting a third potential difference, substantially lower than the first potential difference, to be applied between two adjacent stages within the first and second sets.

### Claim 12 (depends on 11)

The method as recited in claim 11, wherein the second potential difference is selected from a range comprising approximately 50-400% of the first potential difference.

### Claim 13 (depends on 11)

The method as recited in claim 11, wherein the third potential difference is selected from a range comprising approximately 5-50% of the first potential difference.

### Claim 14 (depends on 11)

The method as recited in claim 11, wherein the step of selecting further comprises selecting a number of the stages to be included within the first set and a number of the stages to be included within the second set.

### Claim 15 (depends on 14)

The method as recited in claim 14, wherein a maximum amount of detection range is provided by including a majority of the stages in the first set and relatively few stages in the second set.

### Claim 16 (depends on 15)

The method as recited in claim 15, wherein a detection resolution of the inspection system is increased at the expense of the detection range by increasing the number of stages within the second set and decreasing the number of stages within the first set.

### Claim 17 (depends on 10)

The method as recited in claim 10, wherein the step of generating a table of values comprises:
directing light to a test wafer, upon which a known set of particles is formed having known light scattering characteristics;
detecting light scattered from the known set of particles using the photodetector and the selected potential distribution, wherein the step of detecting comprises obtaining the range of photodetector output signals;
applying a numerical fitting and interpolation algorithm to convert the range of photodetector output signals into the actual amounts of scattered light using the known light scattering characteristics from the test wafer; and
generating the table of values by correlating each photodetector output signal to a respective actual amount of light.

### Claim 18 (depends on 17)

The method as recited in claim 17, wherein the step of generating a table of values further comprises correlating each photodetector output signal to a respective known light scattering characteristic.

### Claim 19 (depends on 17)

The method as recited in claim 17, wherein the known light scattering characteristics comprise a particle size for each of the known set of particles.

### Claim 20 (depends on 17)

The method as recited in claim 17, wherein the numerical fitting and interpolation algorithm is selected from a group comprising linear fitting and interpolation algorithms and polynomial fitting and interpolation algorithms.

### Claim 21

A method for inspecting a specimen, the method comprising:
directing light to the specimen;
detecting light scattered from the specimen, wherein said detecting comprises:
receiving an output signal from a photodetector having a plurality of stages and a potential distribution applied to intentionally saturate at least one of the stages used to generate the output signal;
calibrating the output signal to remove non-linear effects created by intentionally saturating the at least one of the stages; and
using the calibrated output signal to detect a feature, defect or light scattering property of the specimen.

### Claim 22 (depends on 21)

The method as recited in claim 21, wherein the step of calibrating the output signal comprises comparing the output signal to a table of values correlating a range of output signals to actual amounts of scattered light.

### Claim 23 (depends on 22)

The method as recited in claim 22, wherein the table of values is pre-computed for the photodetector and a particular potential distribution.

### Claim 24 (depends on 22)

The method as recited in claim 22, wherein the table of values is pre-computed for the photodetector and a number of different potential distributions.

### Claim 25 (depends on 22)

The method as recited in claim 22, wherein the step of using the calibrated output signal comprises using the actual amount of scattered light corresponding to the output signal to determine a size of the feature, defect or light scattering property of the specimen.