# US 7,746,443 B2 · Method of utilizing dual-layer photoresist to form black matrixes and spacers on a control circuit substrate

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- Number: US 7,746,443 B2
- Document ID: US7746443B2
- Status: Granted
- Kind: B2
- Application number: 11/257,240
- Filed: 2005-10-24
- Published: 2006-02-16
- Granted: 2010-06-29
- Earliest claimed: 2002-11-26
- Assignees: Hannstar Display Corp.
- Inventors: Chih-Chieh Lan; Hung-Yi Hung; Yu-Fang Wang
- Web page: https://patentgrep.com/patent/US7746443B2

## CPC

- G02F 1/13394: {spacers regularly patterned on the cell subtrate, e.g. walls, pillars (G02F1/133377 takes precedence)}
- G02F 1/136209: {Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element}
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS

## Abstract

A method of utilizing dual-layer photoresist to form black matrixes and spacers on a control circuit substrate is provided. The dual-layer photoresist includes a layer of black resin and a layer of transparent photoresist. The black resin, having an optical density greater than three, is mainly used to achieve the effect of black matrix. The transparent photoresist is mainly used to satisfy the needed cell gap between two transparent substrates.

## Claims

### Claim 1

A method of utilizing dual-layer photoresist to form black matrixes and spacers on a control circuit substrate, the control circuit substrate having a control circuit made of control devices having a passivation layer formed thereon, and the passivation layer having contact windows to expose electrodes of the control devices respectively, comprising:
forming a color filter layer on the control circuit substrate;
forming pixel electrodes on the color filter layer, each pixel electrode electrically connecting to the electrode of each of the control devices through each of the contact windows;
forming a black resin on the control circuit substrate to overlap the contact windows in the passivation layer;
performing a first soft baking step to soft-bake the black resin;
forming a transparent photoresist on the black resin, wherein an exposure dose of the transparent photoresist is about 19 mj/cm2;
performing a second soft baking step to soft-bake the transparent photoresist;
patterning the transparent photoresist and the black resin to form spacers respectively on opaque areas of the control circuit by only one photomask; and
hard baking the transparent photoresist and the black resin.

### Claim 2 (depends on 1)

The method of claim 1, wherein an optical density of the black resin is greater than 3.

### Claim 3 (depends on 1)

The method of claim 1, wherein the black resin is non-photosensitive.

### Claim 4 (depends on 3)

The method of claim 3, wherein a thickness of the black resin is about 0.2-1.5 μm.

### Claim 5 (depends on 3)

The method of claim 3, wherein the step of patterning the transparent photoresist and the black resin further comprises:
exposing the transparent photoresist; and
developing the transparent photoresist to pattern the transparent photoresist by using a developer solution, the developer solution being used to remove the black resin uncovered by the transparent photoresist.

### Claim 6 (depends on 3)

The method of claim 3, wherein the transparent photoresist is positive photosensitive in type.

### Claim 7 (depends on 3)

The method of claim 3, wherein the transparent photoresist is negative photosensitive in type.

### Claim 8 (depends on 1)

The method of claim 1, wherein the transparent photoresist is negative photoresist in type while the black resin is negative photoresist in type.

### Claim 9 (depends on 8)

The method of claim 8, wherein a thickness of the black resin is about 1-2 μm.

### Claim 10 (depends on 8)

The method of claim 8, wherein the step of patterning the transparent photoresist and the black resin further comprises:
exposing the transparent photoresist and the black resin; and
developing the transparent photoresist and the black resin.

### Claim 11 (depends on 1)

The method of claim 1, further comprising:
forming a transparent conductive layer to form a common electrode on a transparent substrate;
parallel assembling the control circuit substrate and the transparent substrate, the pixel electrode and the common electrode being located inside;
sealing a periphery of the control circuit substrate and the transparent substrate and leaving one opening only;
pouring liquid crystal into the opening to fill a space between the control circuit substrate and the transparent substrate; and
sealing the opening.

### Claim 12

The method of clam 1, wherein the control circuit comprises a thin-film-transistor array substrate.