# US 7,745,991 B2 · Electro-optical device having an EL layer over a plurality of pixels

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- Number: US 7,745,991 B2
- Document ID: US7745991B2
- Status: Granted
- Kind: B2
- Application number: 10/885,953
- Filed: 2004-07-08
- Published: 2005-02-17
- Granted: 2010-06-29
- Earliest claimed: 1999-10-12
- Assignees: Semiconductor Energy Laboratory Co., Ltd.
- Inventors: Shunpei Yamazaki; Kunitaka Yamamoto; Yasuyuki Arai
- Web page: https://patentgrep.com/patent/US7745991B2

## CPC

- H10K 59/124: Insulating layers formed between TFT elements and OLED elements
- H10K 71/135: {using ink-jet printing}
- H10D 30/6715: {characterised by the doping profiles, e.g. having lightly-doped source or drain extensions}
- H10D 30/6717: {the source and the drain regions being asymmetrical}
- H10D 30/6719: {having significant overlap between the lightly-doped drains and the gate electrodes, e.g. gate-overlapped LDD [GOLDD] TFTs}
- H10D 30/6733: {Multi-gate TFTs}
- H10D 30/674: {characterised by the active materials}
- H10D 86/00: Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D 86/40: characterised by multiple TFTs
- H10D 86/60: wherein the TFTs are in active matrices
- H10K 59/122: Pixel-defining structures or layers, e.g. banks
- H10K 59/35: comprising red-green-blue [RGB] subpixels
- H10K 59/80522: {combined with auxiliary electrodes}
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

The present invention aims to provide simple, high-speed processing for the formation of an EL layer by an ink-jet method. A method of manufacturing an electro-optical device having good operation performance and high reliability, and in particular, a method of manufacturing an EL display device, is provided. The present invention forms EL layers continuously across a plurality of pixels when the EL layers are formed by the ink-jet method. Specifically, with respect to m columns and n rows of pixel electrodes arranged in a matrix state, the EL layers are formed so as to form stripes with respect to one certain selected row or one column. The EL layers may also be formed having an oblong shape or a rectangular shape with respect to each pixel electrode.

## Claims

### Claim 1

A light-emitting device comprising:
a plurality of TFTs over a substrate;
a first passivation film over the plurality of TFTs;
a leveling film over the first passivation film;
a second passivation film over the leveling film;
a plurality of first pixel electrodes and a plurality of second pixel electrodes over the second passivation film, the plurality of first pixel electrodes and the plurality of second pixel electrodes each being connected to one of the plurality of TFTs;
a first separation layer, a second separation layer and a third separation layer each extending in a line over the second passivation film so that the plurality of first electrodes are arranged between the first separation layer and the second separation layer and the plurality of second electrodes are arranged between the second separation layer and the third separation layer;
a first EL layer over the plurality of first pixel electrodes, the first EL layer extending along the first separation layer and the second separation layer; and
a second EL layer over the plurality of second pixel electrodes, the second EL layer extending along the second separation layer and the third separation layer,
wherein the first EL layer is formed to be continuous over the plurality of first pixel electrodes, and
wherein the second EL layer is formed to be continuous over the plurality of second pixel electrodes.

### Claim 2 (depends on 1)

A light-emitting device according to claim 1,
wherein the second passivation film is formed for preventing transmission of alkali metals.

### Claim 3 (depends on 2)

A device according to claim 2,
wherein a gap between adjacent pixels of a plurality of pixels is in a range of 5 to 10 times of a thickness of at least one of the first EL layer and the second EL layer.

### Claim 4 (depends on 3)

A device according to claim 3, wherein the gap is in a range of 250-2500 nm.

### Claim 5 (depends on 2)

A device according to claim 2, wherein each of the first and second EL layers comprises an organic material.

### Claim 6 (depends on 1)

A device according to claim 1,
wherein a gap between adjacent pixels of a plurality of pixels is in a range of 5 to 10 times of a thickness of at least one of the first EL layer and the second EL layer.

### Claim 7 (depends on 6)

A device according to claim 6, wherein the gap is in a range of 250-2500 nm.

### Claim 8 (depends on 1)

A device according to claim 1, wherein each of the first and second EL layers comprises an organic material.

### Claim 9 (depends on 1)

A device according to claim 1, wherein the second passivation film comprises an organic resin material.

### Claim 10 (depends on 1)

A device according to claim 1, wherein the second passivation film comprises at least one element selected from the group consisting of B (boron), C (carbon), and N (nitrogen), Al (aluminum), Si (silicon), and P (phosphorous).

### Claim 11 (depends on 1)

A device according to claim 1, wherein the second passivation film comprises Si, Al, N, O, and M, wherein M denotes at least one rare earth element.

### Claim 12

A light-emitting device comprising:
a plurality of TFTs over a substrate;
a first passivation film over the plurality of TFTs;
a leveling film over the first passivation film;
a second passivation film over the leveling film;
a plurality of first pixel electrodes and a plurality of second pixel electrodes over the second passivation film, the plurality of first pixel electrodes and the plurality of second pixel electrodes each being connected to one of the plurality of TFTs;
a first separation layer, a second separation layer and a third separation layer each extending in a line over the second passivation film so that the plurality of first electrodes are arranged between the first separation layer and the second separation layer and the plurality of second electrodes are arranged between the second separation layer and the third separation layer;
a first EL layer over the plurality of first pixel electrodes, the first EL layer extending along the first separation layer and the second separation layer; and
a second EL layer over the plurality of second pixel electrodes, the second EL layer extending along the second separation layer and the third separation layer,
wherein the first EL layer is formed to be continuous over the plurality of first pixel electrodes and has an oblong shape or a rectangular shape corresponding to the plurality of first pixel electrodes, and
wherein the second EL layer is formed to be continuous over the plurality of second pixel electrodes and has an oblong shape or a rectangular shape corresponding to the plurality of second pixel electrodes.

### Claim 13 (depends on 12)

A light-emitting device according to claim 12,
wherein the second passivation film is formed for preventing transmission of alkali metals.

### Claim 14 (depends on 13)

A device according to claim 13,
wherein a gap between adjacent pixels of a plurality of pixels is in a range of 5 to 10 times of a thickness of at least one of the first EL layer and the second EL layer.

### Claim 15 (depends on 14)

A device according to claim 14, wherein the gap is in a range of 250-2500 nm.

### Claim 16 (depends on 13)

A device according to claim 13, wherein each of the first and second EL layers comprises an organic material.

### Claim 17 (depends on 12)

A device according to claim 12,
wherein a gap between adjacent pixels of a plurality of pixels is in a range of 5 to 10 times of a thickness of at least one of the first EL layer and the second EL layer.

### Claim 18 (depends on 17)

A device according to claim 17, wherein the gap is in a range of 250-2500 nm.

### Claim 19 (depends on 12)

A device according to claim 12, wherein each of the first and second EL layers comprises an organic material.

### Claim 20 (depends on 12)

A device according to claim 12, wherein the second passivation film comprises an organic resin material.

### Claim 21 (depends on 12)

A device according to claim 12, wherein the second passivation film comprises at least the element selected from the group consisting of B (boron), C (carbon), and N (nitrogen), Al (aluminum), Si (silicon), and P (phosphorous).

### Claim 22 (depends on 12)

A device according to claim 12, wherein the second passivation film comprises Si, Al, N, O, and M, wherein M denotes at least one rare earth element.

### Claim 23

A light-emitting device comprising:
a plurality of first TFTs over a substrate;
a plurality of second TFTs over the substrate;
a plurality of third TFTs over the substrate;
a first passivation film over the plurality of first TFTs, the plurality of second TFTs and the plurality of third TFTs;
a leveling film over the first passivation film;
a second passivation film over the leveling film;
a plurality of first pixel electrodes over the the second passivation film, the plurality of first pixel electrodes each being connected to one of the plurality of first TFTs;
a plurality of second pixel electrodes over the the second passivation film, the plurality of second pixel electrodes each being connected to one of the plurality of second TFTs;
a plurality of third pixel electrodes over the the second passivation film, the plurality of third pixel electrodes each being connected to one of the plurality of third TFTs;
a first separation layer, a second separation layer, a third separation layer and a fourth separation layer each extending in a line over the second passivation film so that the plurality of first electrodes are arranged between the first separation layer and the second separation layer, the plurality of second electrodes are arranged between the second separation layer and the third separation layer, and the plurality of third electrodes are arranged between the third separation layer and the fourth separation layer;
a first EL layer for emitting a red color light over the plurality of first pixel electrodes, the first EL layer extending along the first separation layer and the second separation layer;
a second EL layer for emitting a green color light over the plurality of second pixel electrodes, the second EL layer extending along the second separation layer and the third separation layer; and
a third EL layer for emitting a blue color light over the plurality of third pixel electrodes, the third EL layer extending along the third separation layer and the fourth separation layer,
wherein the first EL layer is formed to be continuous over the plurality of first pixel electrodes,
wherein the second EL layer is formed to be continuous over the plurality of second pixel electrodes, and
wherein the third EL layer is formed to be continuous over the plurality of third pixel electrodes.

### Claim 24 (depends on 23)

A light-emitting device according to claim 23,
wherein the second passivation film is formed for preventing transmission of alkali metals.

### Claim 25 (depends on 24)

A device according to claim 24,
wherein a first gap between adjacent pixels of a plurality of first pixels is in a range of 5 to 10 times of a thickness of the first EL layer,
wherein a second gap between adjacent pixels of a plurality of second pixels is in a range of 5 to 10 times of a thickness of the second EL layer, and
wherein a third gap between adjacent pixels of a plurality of third pixels is in a range of 5 to 10 times of a thickness of the third EL layer.

### Claim 26 (depends on 25)

A device according to claim 25, wherein the gap is in a range of 250-2500 nm.

### Claim 27 (depends on 24)

A device according to claim 24, wherein each of the first, second and third EL layers comprises an organic material.

### Claim 28 (depends on 23)

A device according to claim 23,
wherein a gap between adjacent pixels of a plurality of first pixels is in a range of 5 to 10 times of a thickness of the first EL layer,
wherein a gap between adjacent pixels of a plurality of second pixels is in a range of 5 to 10 times of a thickness of the second EL layer, and
wherein a gap between adjacent pixels of a plurality of third pixels is in a range of 5 to 10 times of a thickness of the third EL layer.

### Claim 29 (depends on 28)

A device according to claim 28, wherein the gap is in a range of 250-2500 nm.

### Claim 30 (depends on 23)

A device according to claim 23, wherein each of the first, second and third EL layers comprises an organic material.

### Claim 31 (depends on 23)

A device according to claim 23, second passivation film comprises an organic resin material.

### Claim 32 (depends on 23)

A device according to claim 23, wherein the second passivation film comprises at least the element selected from the group consisting of B (boron), C (carbon), and N (nitrogen), Al (aluminum), Si (silicon), and P (phosphorous).

### Claim 33 (depends on 23)

A device according to claim 23, wherein the second passivation film comprises Si, Al, N, O, and M, wherein M denotes at least one rare earth element.

### Claim 34

A light-emitting device comprising:
a plurality of first TFTs over a substrate;
a plurality of second TFTs over the substrate;
a plurality of third TFTs over the substrate;
a first passivation film over the plurality of first TFTs, the plurality of second TFTs and the plurality of third TFTs;
a leveling film over the first passivation film;
a second passivation film over the leveling film;
a plurality of first pixel electrodes over the the second passivation film, the plurality of first pixel electrodes each being connected to one of the plurality of first TFTs;
a plurality of second pixel electrodes over the the second passivation film, the plurality of second pixel electrodes each being connected to one of the plurality of second TFTs;
a plurality of third pixel electrodes over the the second passivation film, the plurality of third pixel electrodes each being connected to one of the plurality of third TFTs;
a first separation layer, a second separation layer, a third separation layer and a fourth separation layer each extending in a line over the second passivation film so that the plurality of first electrodes are arranged between the first separation layer and the second separation layer, the plurality of second electrodes are arranged between the second separation layer and the third separation layer, and the plurality of third electrodes are arranged between the third separation layer and the fourth separation layer;
a first EL layer for emitting a red color light over the plurality of first pixel electrodes, the first EL layer extending along the first separation layer and the second separation layer;
a second EL layer for emitting a green color light over the plurality of second pixel electrodes, the second EL layer extending along the second separation layer and the third separation layer; and
a third EL layer for emitting a blue color light over the plurality of third pixel electrodes, the third EL layer extending along the third separation layer and the fourth separation layer,
wherein the first EL layer is formed to be continuous over the plurality of first pixel electrodes and has an oblong shape or a rectangular shape corresponding to the plurality of first pixel electrodes,
wherein the second EL layer is formed to be continuous over the plurality of second pixel electrodes and has an oblong shape or a rectangular shape corresponding to the plurality of second pixel electrodes,
wherein the third EL layer is formed to be continuous over the plurality of second pixel electrodes and has an oblong shape or a rectangular shape corresponding to the plurality of third pixel electrodes.

### Claim 35 (depends on 34)

A light-emitting device according to claim 34,
wherein the second passivation film is formed for preventing transmission of alkali metals.

### Claim 36 (depends on 35)

A device according to claim 35,
wherein a first gap between adjacent pixels of a plurality of first pixels is in a range of 5 to 10 times of a thickness of the first EL layer,
wherein a second gap between adjacent pixels of a plurality of second pixels is in a range of 5 to 10 times of a thickness of the second EL layer, and
wherein a third gap between adjacent pixels of a plurality of third pixels is in a range of 5 to 10 times of a thickness of the third EL layer.

### Claim 37 (depends on 36)

A device according to claim 36, wherein the gap is in a range of 250-2500 nm.

### Claim 38 (depends on 35)

A device according to claim 35, wherein each of the first, second and third EL layers comprises an organic material.

### Claim 39 (depends on 34)

A device according to claim 34,
wherein a gap between adjacent pixels of a plurality of first pixels is in a range of 5 to 10 times of a thickness of the first EL layer,
wherein a gap between adjacent pixels of a plurality of second pixels is in a range of 5 to 10 times of a thickness of the second EL layer, and
wherein a gap between adjacent pixels of a plurality of third pixels is in a range of 5 to 10 times of a thickness of the third EL layer.

### Claim 40 (depends on 39)

A device according to claim 39, wherein the gap is in a range of 250-2500 nm.

### Claim 41 (depends on 34)

A device according to claim 34, wherein each of the first, second and third EL layers comprises an organic material.

### Claim 42 (depends on 34)

A device according to claim 34, wherein the second passivation film comprises an organic resin material.

### Claim 43 (depends on 34)

A device according to claim 34, wherein the second passivation film comprises at least one element selected from die group consisting of B (boron), C (carbon), and N (nitrogen), Al (aluminum), Si (silicon), and P (phosphorous).

### Claim 44 (depends on 34)

A device according to claim 34, wherein the second passivation film comprises Si, Al, N, O, and M, wherein M denotes at least one rare earth element.

### Claim 45

A light-emitting device comprising:
a plurality of TFTs over a substrate;
a first passivation film over the plurality of TFTs;
a leveling film over the first passivation film;
a second passivation film over the leveling film;
a plurality of first pixel electrodes and a plurality of second pixel electrodes over the second passivation film, the plurality of first pixel electrodes and the plurality of second pixel electrodes each being connected to one of the plurality of TFTs;
a first separation layer, a second separation layer and a third separation layer each extending in a line over the second passivation film so that the plurality of first electrodes are arranged between the first separation layer and the second separation layer and the plurality of second electrodes are arranged between the second separation layer and the third separation layer;
a first EL layer over the plurality of first pixel electrodes, the first EL layer extending along the first separation layer and the second separation layer; and
a second EL layer over the plurality of second pixel electrodes, the second EL layer extending along the second separation layer and the third separation layer,
wherein the first EL layer is formed to be continuous over the plurality of first pixel electrodes,
wherein the second EL layer is formed to be continuous over the plurality of second pixel electrodes, and
wherein the cathode is in contact with the first to third separation layers.

### Claim 46 (depends on 45)

A light-emitting device according to claim 45,
wherein the second passivation film is formed for preventing transmission of alkali metals.

### Claim 47 (depends on 46)

A device according to claim 46,
wherein a gap between adjacent pixels of a plurality of pixels is in a range of 5 to 10 times of a thickness of at least one of the first EL layer and the second EL layer.

### Claim 48 (depends on 47)

A device according to claim 47, wherein the gap is in a range of 250-2500 nm.

### Claim 49 (depends on 46)

A device according to claim 46, wherein each of the first and second EL layers comprises an organic material.

### Claim 50 (depends on 45)

A device according to claim 45,
wherein a gap between adjacent pixels of a plurality of pixels is in a range of 5 to 10 times of a thickness of the first EL layer, and
wherein a gap between adjacent pixels of a plurality of pixels is in a range of 5 to 10 times of a thickness of the second EL layer.

### Claim 51 (depends on 50)

A device according to claim 50, wherein the gap is in a range of 250-2500 nm.

### Claim 52 (depends on 45)

A device according to claim 45, wherein each of the first and second EL layers comprises an organic material.

### Claim 53 (depends on 45)

A device according to claim 45, wherein the second passivation film comprises an organic resin material.

### Claim 54 (depends on 45)

A device according to claim 45, wherein the second passivation film comprises at least one element selected from the group consisting of B (boron), C (carbon), and N (nitrogen), Al (aluminum), Si (silicon), and P (phosphorous).

### Claim 55 (depends on 45)

A device according to claim 45, wherein the second passivation film comprises Si, Al, N, O, and M, wherein M denotes at least one rare earth element.