# US 7,745,815 B2 · Polarization-sensitive quantum well infrared photodetector focal plane array

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- Number: US 7,745,815 B2
- Document ID: US7745815B2
- Status: Granted
- Kind: B2
- Application number: 11/653,785
- Filed: 2007-01-16
- Published: 2007-08-16
- Granted: 2010-06-29
- Earliest claimed: 2006-01-16
- Assignees: California Institute of Technology
- Inventors: Sumith V. Bandara; Sarath Gunapala; John K. Liu
- Web page: https://patentgrep.com/patent/US7745815B2

## CPC

- H10F 39/1847: {Multispectral infrared image sensors having a stacked structure, e.g. NPN, NPNPN or multiple quantum well [MQW] structures}
- G01J 4/04: Polarimeters using electric detection means (G01J4/02 takes precedence)
- H10F 30/2215: {the devices comprising active layers made of only Group III-V materials}
- H10F 39/806: {Optical elements or arrangements associated with the image sensors}
- H10F 77/1248: {having three or more elements, e.g. GaAlAs, InGaAs or InGaAsP}
- H10F 77/146: {Superlattices; Multiple quantum well structures}
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)

## Abstract

A quantum well infrared photodetector (QWIP) focal plane array having structures, each structure having stacked layers of quantum wells and a reflective grating to provide polarization sensitivity. The reflective grating is etched to provide electrical contacts for individual pixels. The reflective gratings comprise grooves, where the grooves for a particular structure run in a particular direction to provide polarization sensitivity. Each structure may comprise groups of quantum well layers, each group sensitive to a particular frequency band. By shorting out unwanted quantum well layers, and by forming the reflective gratings to come into contact with the quantum well layers having a particular frequency band sensitivity, the pixels in the QWIP focal plane array may provide frequency and polarization information.

## Claims

### Claim 1

An apparatus comprising:
a first structure comprising a plurality of quantum wells and a reflective grating having grooves running in a first direction; and
a second structure comprising a plurality of quantum wells and a reflective grating having grooves running in a second direction, wherein the second direction is different than the first direction.

### Claim 2 (depends on 1)

The apparatus as set forth in claim 1, wherein the first direction is orthogonal to the second direction.

### Claim 3 (depends on 1)

The apparatus as set forth in claim 1, the plurality of quantum wells in the first structure comprising:
a first group of stacked layers of quantum wells to absorb infrared radiation in a first frequency band; and
a second group of stacked layers of quantum wells to absorb infrared radiation in a second frequency band.

### Claim 4 (depends on 3)

The apparatus as set forth in claim 3, the first and second groups of stacked layers of quantum wells each having, respectively, a top layer and a bottom layer; the first structure comprising:
a first doped layer in electrical contact with the top layer of the first group of stacked layers of quantum wells;
a second doped layer in electrical contact with the bottom layer of the first group of stacked layers of quantum wells and the top layer of the second group of stacked layers of quantum wells; and
a third doped layer in electrical contact with the bottom layer of the second group of stacked layers of quantum wells.

### Claim 5 (depends on 4)

The apparatus as set forth in claim 4, wherein the reflective grating of the first structure is in electrical contact with the first doped layer, and the second and third doped layers are short circuited to each other.

### Claim 6 (depends on 4)

The apparatus as set forth in claim 4, wherein the reflective grating of the first structure is formed to be in electrical contact with the second doped layer and to short circuit the first doped layer to the second doped layer.

### Claim 7 (depends on 4)

The apparatus as set forth in claim 4, further comprising a third structure comprising a reflective grating having grooves running in the first direction.

### Claim 8 (depends on 7)

The apparatus as set forth in claim 7, the third structure comprising:
a first group of stacked layers of quantum wells to absorb infrared radiation in the first frequency band; and
a second group of stacked layers of quantum wells to absorb infrared radiation in the second frequency band.

### Claim 9 (depends on 8)

The apparatus as set forth in claim 8, the first and second groups of stacked layers of quantum wells in the third structure each having, respectively, a top layer and a bottom layer; the third structure comprising:
a first doped layer in electrical contact with the top layer of the first group of stacked layers of quantum wells in the third structure;
a second doped layer in electrical contact with the bottom layer of the first group of stacked layers of quantum wells in the third structure and the top layer of the second group of stacked layers of quantum wells in the third structure; and
a third doped layer in electrical contact with the bottom layer of second group of stacked layers of quantum wells in the third structure.

### Claim 10 (depends on 9)

The apparatus as set forth in claim 9, wherein the reflective grating of the first structure is in electrical contact with the first doped layer of the first structure, and the second and third doped layers in the first structure are short circuited to each other.

### Claim 11 (depends on 10)

The apparatus as set forth in claim 10, wherein the reflective grating of the third structure is formed to be in electrical contact with the second doped layer of the third structure and to short circuit the first doped layer of the third structure to the second doped layer of the third structure.

### Claim 12 (depends on 11)

The apparatus as set forth in claim 11, the first structure having an index of refraction nR, the reflective grating in the first structure having a groove depth h, where
h
=
(
2
⁢
⁢
n
+
1
)
⁢
λ
4
⁢
⁢
n
R
,
where n is a non-negative integer, and where λ is a wavelength in the first frequency band.

### Claim 13 (depends on 12)

The apparatus as set forth in claim 12, the third structure having the index of refraction nR, the reflective grating in the third structure having a groove depth h2, where
h
2
=
(
2
⁢
⁢
n
2
+
1
)
⁢
λ
2
4
⁢
⁢
n
R
,
where n2 is a non-negative integer, and where λ2 is a wavelength in the second frequency band.

### Claim 14 (depends on 1)

The apparatus as set forth in claim 1, the plurality of quantum wells in the first structure comprising a group of quantum wells sensitive to infrared radiation having a free-space wavelength λ, the first structure having an index of refraction nR, the reflective grating in the first structure having a groove depth h, where
h
=
(
2
⁢
⁢
n
+
1
)
⁢
λ
4
⁢
⁢
n
R
,
where n is a non-negative integer.

### Claim 15 (depends on 4)

The apparatus as set forth in claim 4, the plurality of quantum wells in the first structure comprising a group of quantum wells sensitive to infrared radiation having a free-space wavelength λ, the first structure having an index of refraction nR, the reflective grating in the first structure having a groove depth h, where
h
=
(
2
⁢
⁢
n
+
1
)
⁢
λ
4
⁢
⁢
n
R
,
where n is a non-negative integer.

### Claim 16 (depends on 1)

The apparatus as set forth in claim 1, further comprising:
a substrate onto which the first and second structures are formed; and
a lens system to focus infrared radiation onto the substrate.

### Claim 17 (depends on 1)

The apparatus as set forth in claim 1, wherein the reflective grating in the first structure is etched to provide electrically independent contacts.

### Claim 18 (depends on 17)

The apparatus as set forth in claim 17, further comprising a processor comprising solder pads, wherein the electrically independent contacts are soldered to the soldering pads.

### Claim 19 (depends on 1)

The apparatus as set forth in claim 1, further comprising:
a third structure comprising a plurality of quantum wells and a reflective grating having first and second sets of grooves, where the first set of grooves orthogonally intersects the second set of grooves.