# US 7,745,803 B2 · Ion doping apparatus, ion doping method, semiconductor device and method of fabricating semiconductor device

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- Number: US 7,745,803 B2
- Document ID: US7745803B2
- Status: Granted
- Kind: B2
- Application number: 10/588,164
- Filed: 2005-02-01
- Published: 2009-01-15
- Granted: 2010-06-29
- Earliest claimed: 2004-02-03
- Assignees: Sharp Kabushiki Kaisha
- Inventors: Ken Nakanishi
- Web page: https://patentgrep.com/patent/US7745803B2

## CPC

- H10D 30/0314: {of lateral top-gate TFTs comprising only a single gate}
- H01J 37/304: Controlling tubes by information coming from the objects {or from the beam}, e.g. correction signals
- H10D 30/0321: {comprising silicon, e.g. amorphous silicon or polysilicon}
- H10D 30/6731: {Top-gate only TFTs}
- H10D 30/6745: {Polycrystalline or microcrystalline silicon}
- H01J 2237/0815: Methods of ionisation
- H01J 2237/31701: Ion implantation
- H10P 72/0436: {mainly by radiation}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

An ion doping apparatus includes: a chamber 11; a discharge section 13 for discharging a gaseous content from within the chamber 11; an ion source 12 being provided in the chamber 11 and including an inlet 14 through which to introduce a gas containing an element to be used for doping, the ion source 12 decomposing the gas introduced through the inlet 14 to generate ions containing the element to be used for doping; an acceleration section 23 for pulling out from the ion source 12 the ions generated at the ion source 12 and accelerating the ions toward a target object held in the chamber; and a beam current meter 26 for measuring a beam current caused by the accelerated ions. The beam current is measured by the beam current meter 26 a plurality of times, and if a result of the measurements indicates a stability of the beam current, the ion doping apparatus automatically begins to implant into the target object the ions containing the element to be used for doping. Thus, an ion doping apparatus having excellent doping amount controllability is provided.

## Claims

### Claim 1

An ion doping apparatus comprising:
a chamber;
a discharge section for discharging a gaseous content from within the chamber;
an ion source being provided in the chamber and including an inlet through which to introduce a gas containing an element to be used for doping, the ion source decomposing the gas introduced through the inlet to generate ions containing the element to be used for doping;
an acceleration section for pulling out from the ion source the ions generated at the ion source and accelerating the ions toward a target object held in the chamber; and
a beam current meter for measuring a beam current caused by the accelerated ions,
wherein the beam current is measured by the beam current meter a plurality of times, and if a result of the measurements indicates a stability of the beam current, the ion doping apparatus automatically begins to implant into the target object the ions containing the element to be used for doping.

### Claim 2 (depends on 1)

The ion doping apparatus of claim 1, wherein if each measurement of the beam current falls within a predetermined range, the ion doping apparatus automatically begins to implant into the target object the ions containing the element to be used for doping.

### Claim 3 (depends on 1)

The ion doping apparatus of claim 1, wherein if a variance of the measurements of the beam current falls within a predetermined range, the ion doping apparatus automatically begins to implant into the target object the ions containing the element to be used for doping.

### Claim 4 (depends on 1, 2, 3)

The ion doping apparatus of claim 1 to 3, wherein a single measurement of the beam current takes place in a period from 50 milliseconds to 1 second.

### Claim 5 (depends on 1)

The ion doping apparatus of claim 1, wherein a measurement interval for the beam current is in a range from 100 milliseconds to 1 second.

### Claim 6 (depends on 1)

The ion doping apparatus of claim 1, wherein the beam current is measured no less than three times and no more than ten times.

### Claim 7 (depends on 1)

The ion doping apparatus of claim 1, further comprising a control section for controlling at least one of the target object and the accelerated ions so that, if the measurements of the beam current as a result of measuring the beam current with the beam current meter a plurality of times fall within the predetermined range, the target object is irradiated with the ions containing the element to be used for doping.

### Claim 8 (depends on 7)

The ion doping apparatus of claim 7, wherein,
the ion source further includes a filament for releasing thermoelectrons and an anode electrode for performing an arc discharge between itself and the filament to decompose the gas, and
the control section controls the arc discharge so that a constant arc current flows between the filament and the anode electrode.