Planar radiation detector using radiation-induced-charge conversion film of amorphous selenium

A planar radiation detector comprising:

• a substrate;
• a charge-collection electrode arranged above said substrate;
• a light-induced-charge conversion film which is formed mainly of amorphous selenium and arranged above said charge-collection electrode, and generates electric charge when the light-induced-charge conversion film is irradiated with visible light which has passed through an upper electrode;
• and
• said upper electrode which is arranged above said light-induced-charge conversion film, and transmits said visible light emitted from a fluorescent layer;
• and said fluorescent layer arranged above said upper electrode and formed of a fluorescent material which converts a radiation carrying image information into said visible light;
• wherein said light-induced-charge conversion film is formed of amorphous selenium or amorphous selenium alloy and has a residual oxygen concentration of 35 ppm or lower.

A planar radiation detector comprising:

• a substrate;
• a charge-collection electrode arranged above said substrate;
• a charge conversion film which is formed mainly of amorphous selenium and arranged above said charge-collection electrode, wherein the charge conversion film is light-induced charge conversion film or radiation-induced charge conversion film;
• and
• an upper electrode which is arranged above said charge conversion film, and transmits the radiation or visible light,
• wherein said charge conversion film is formed of amorphous selenium or amorphous selenium alloy and has a residual oxygen concentration of 35 ppm or lower.