# US 7,745,101 B2 · Nanoparticle patterning process

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- Number: US 7,745,101 B2
- Document ID: US7745101B2
- Status: Granted
- Kind: B2
- Application number: 11/421,894
- Filed: 2006-06-02
- Published: 2007-12-06
- Granted: 2010-06-29
- Earliest claimed: 2006-06-02
- Assignees: Eastman Kodak Company
- Inventors: Lee W. Tutt; Therese M. Feller
- Web page: https://patentgrep.com/patent/US7745101B2

## CPC

- G03F 7/40: Treatment after imagewise removal, e.g. baking
- G03F 7/0047: {characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

A method of making a metallic pattern (250) comprises: depositing a layer of photoresist (130) on a substrate (110); forming a pattern on the photoresist; depositing a layer of metal nanoparticles (190) on the photoresist and pattern; removing the photoresist and overlying metal nanoparticles on the photoresist; and sintering the remaining nanoparticles to form a metallic pattern.

## Claims

### Claim 1

A method of making a metallic pattern comprising:
depositing a layer of photoresist on a substrate;
forming a pattern of opening in said photoresist;
depositing a layer of metal nanoparticles on said photoresist and on said pattern;
removing said photoresist and overlying metal nanoparticles on said photoresist; and
sintering the remaining said nanoparticles to form a metallic pattern.

### Claim 2 (depends on 1)

The method of claim 1 wherein said metal nanoparticles are silver.

### Claim 3 (depends on 1)

The method of claim 1 wherein said metal nanoparticles are gold.

### Claim 4 (depends on 1)

The method of claim 1 wherein said deposition of said metal nanoparticles is by spin coating.

### Claim 5 (depends on 1)

The method of claim 1 wherein said deposition of said metal nanoparticles is by spray coating.

### Claim 6 (depends on 1)

The method of claim 1 wherein said deposition of said metal nanoparticles is by inkjet printing.

### Claim 7 (depends on 1)

The method of claim 1 wherein said deposition of said metal nanoparticles is by gravure printing.

### Claim 8 (depends on 1)

The method of claim 1 wherein said deposition of said metal nanoparticles is by offset printing.

### Claim 9 (depends on 1)

The method of claim 1 wherein said deposition of said metal nanoparticles is by knife coating.

### Claim 10 (depends on 1)

The method of claim 1 wherein said deposition of said metal nanoparticles is by flexography.

### Claim 11 (depends on 1)

The method of claim 1 wherein said deposition of said metal nanoparticles is by hopper coating.

### Claim 12 (depends on 1)

The method of claim 1 wherein said pattern is formed by ultraviolet or visible light projected through a mask onto said photoresist followed by development.

### Claim 13 (depends on 1)

The method claim 1 further comprising:
scanning and modulating ultraviolet or visible laser onto said layer of photoresist;
developing said layer of photoresist.

### Claim 14

A method of making a metallic pattern comprising:
depositing a layer of thermal resist on a substrate;
forming a pattern of opening in said thermal resist;
depositing a layer of metal nanoparticles on said thermal resist and pattern;
removing remaining thermal resist and overlying metal nanoparticles on said remaining thermal resist; and
sintering remaining said nanoparticles to form a metallic pattern.