# US 7,745,092 B2 · Multiple step printing methods for microbarcodes

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- Number: US 7,745,092 B2
- Document ID: US7745092B2
- Status: Granted
- Kind: B2
- Application number: 11/521,114
- Filed: 2006-09-13
- Published: 2007-06-28
- Granted: 2010-06-29
- Earliest claimed: 2005-09-13
- Assignees: Affymetrix, Inc.
- Inventors: Randall True
- Web page: https://patentgrep.com/patent/US7745092B2

## CPC

- G01N 33/532: Production of labelled immunochemicals
- G01N 33/585: {with a particulate label, e.g. coloured latex}
- G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping}
- G03F 7/0035: {Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface}
- G09F 3/00: Labels, tag tickets, or similar identification or indication means (medals or badges A44C3/00; making labels B31D1/02; sheets temporarily attached together B42F; labelling B65C; labels on record carriers G11B23/38, G11B23/40); Seals; Postage or like stamps
- B82Y 25/00: Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
- H01F 1/0072: {one dimensional, i.e. linear or dendritic nanostructures}
- Y10T 428/2989: Microcapsule with solid core [includes liposome]
- Y10T 428/2996: Glass particles or spheres
- Y10T 436/143333: Saccharide [e.g., DNA, etc.]
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- G09F: DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- H01F: MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A method of forming a plurality of encoded microparticles with a lithography process to define codes for identifying the particles is disclosed herein.

## Claims

### Claim 1

A method of forming a plurality of encoded microparticles comprising the steps of:
(a) providing a planar substrate on which the encoded microparticles are to be formed;
(b) providing a reticle having a reticle pattern;
(c) exposing the substrate to light transmitted through the reticle, thereby printing a first portion of an encoding pattern onto the substrate;
(d) moving the substrate in a lateral direction;
(e) exposing the substrate to light transmitted through the reticle, thereby printing the reticle pattern onto the substrate;
(f) optionally repeating steps (d) and (e) to create the encoding pattern; and
(g) removing a portion of the remaining substrate to form the encoded microparticles.

### Claim 2 (depends on 1)

The method of claim 1, further comprising:
depositing a first layer composed of a transparent material on the substrate.

### Claim 3 (depends on 2)

The method of claim 2, further comprising:
depositing a second layer composed of an opaque material on the first layer.

### Claim 4 (depends on 2)

The method of claim 2, wherein the transparent material comprises glass.

### Claim 5 (depends on 1)

The method of claim 1, wherein the microparticles comprise a longitudinal axis and wherein a cross section perpendicular to the longitudinal axis of the microparticle is substantially rectangular.

### Claim 6 (depends on 1)

The method of claim 1, wherein a volume of the microparticle is 20,000 cubic microns or less.

### Claim 7 (depends on 1)

The method of claim 1, wherein a length of the microparticle is 50 microns or less.

### Claim 8 (depends on 1)

The method of claim 1, wherein a width of the microparticle is 5 microns or less.

### Claim 9 (depends on 1)

The method of claim 1, wherein an aspect ratio of the microparticle is 3:1 or higher.

### Claim 10 (depends on 1)

The method of claim 1, further comprising:
depositing a plurality of fluorescent molecules on the surface of the microparticles.

### Claim 11 (depends on 1)

The method of claim 1, further comprising:
attaching a plurality of biochemical molecules on the surface of the microparticles.

### Claim 12 (depends on 1)

The method of claim 1, wherein the lithography process is photolithography.

### Claim 13 (depends on 1)

The method of claim 1, wherein the lithography process is imprint lithography.

### Claim 14

A method of forming a plurality of encoded microparticles comprising the steps of:
(a) providing a substrate on which the encoded microparticles are to be formed;
(b) performing a first lithography step to print a first pattern on a substrate, wherein the pattern forms a first portion of an encoding pattern;
(c) performing a second lithography step to print a second pattern on the substrate, wherein the second lithography step is performed at a lateral offset from the first lithography step, and wherein the second pattern forms a second portion of the encoding pattern;
(d) optionally repeating a third lithography step at different lateral offsets to create the encoding pattern; and
(e) removing a portion of the remaining substrate to form the encoded microparticles.

### Claim 15 (depends on 14)

The method of claim 14, wherein the first pattern and second pattern are the same pattern.

### Claim 16 (depends on 15)

The method of claim 15, wherein optionally repeating the third lithography step at different lateral offsets comprises exposing the substrate to one of the first pattern and second pattern multiple times at different lateral offsets.

### Claim 17 (depends on 14)

The method of claim 14, wherein the first pattern and second pattern are different patterns.

### Claim 18 (depends on 17)

The method of claim 17, wherein the patterns have features that are substantially orthogonal.

### Claim 19 (depends on 14)

The method of claim 14, further comprising:
depositing a first layer composed of a transparent material on the substrate.

### Claim 20 (depends on 19)

The method of claim 19, further comprising:
depositing a second layer composed of an opaque material on the first layer.

### Claim 21 (depends on 19)

The method of claim 19, wherein the transparent material comprises glass.

### Claim 22 (depends on 14)

The method of claim 14, wherein the lithography process is photolithography.

### Claim 23 (depends on 14)

The method of claim 14, wherein the lithography process is embossing lithography.

### Claim 24 (depends on 14)

The method of claim 14, wherein performing the first lithography step comprises performing the first lithography step wherein the pattern forms the first portion of the encoding pattern for a plurality of parallel microparticles.

### Claim 25 (depends on 24)

The method of claim 24, wherein performing the first lithography step comprises performing the first lithography step wherein the pattern comprises an array of stripes.

### Claim 26 (depends on 14)

The method of claim 14, wherein the third lithography step comprises printing the first pattern or the second pattern on the substrate.

### Claim 27 (depends on 1)

The method of claim 1, wherein providing the reticle comprises providing the reticle having a pattern for printing a plurality of parallel encoded microparticles.

### Claim 28 (depends on 27)

The method of claim 27, wherein providing the reticle comprises providing the reticle having an array of stripes.

### Claim 29 (depends on 1)

The method of claim 1, wherein moving the substrate in the lateral direction comprises moving the substrate not more than a full length of the encoded microparticle.