Nanolithography methods and products therefor and produced thereby
AssigneeNorthwestern University
InventorsChad A. Mirkin, Seunghun Hong, Vinayak P. Dravid
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Abstract
In one aspect, a method of nanolithography is provided, the method comprising providing a substrate; providing a scanning probe microscope tip; coating the tip with a deposition compound; and subjecting said coated tip to a driving force to deliver said deposition compound to said substrate so as to produce a desired pattern. Another aspect of the invention provides a tip for use in nanolithography having an internal cavity and an aperture restricting movement of a deposition compound from the tip to the substrate. The rate and extent of movement of the deposition compound through the aperture is controlled by a driving force.
Claims17
A method of nanolithography, comprising:
- providing a substrate;
- providing a tip comprising an internal cavity having an external opening to the surface of said tip, wherein said opening comprises an internal diameter of less than about 200 nanometers;
- loading said cavity with a deposition compound, wherein said deposition compound does not pass through said external opening in the absence of a driving force;
- and
- subjecting said tip to a driving force to deliver said deposition compound through said external opening to be deposited on said substrate;
- wherein the driving force is selected from the group consisting of an electrical and a magnetic driving force,
- wherein, for the electrical driving force, the deposition compound is a charged compound subjected to an applied electric field, and
- wherein, for the magnetic driving force, the deposition compound is a magnetic compound or a magnetically tagged compound subjected to a magnetic field.
A method of nanolithography, comprising:
- providing a substrate;
- providing a scanning probe microscope tip comprising an internal cavity having an external opening to the surface of said tip, wherein said tip is coated with a hydrophobic compound and wherein said opening comprises an internal diameter of about 1 nanometer to about 15 nanometers;
- loading said cavity with a deposition compound, wherein said deposition compound does not pass through said external opening in the absence of a driving force;
- and
- subjecting said tip to a driving force to deliver said deposition compound through said external opening to be deposited on said substrate;
- wherein said driving force is selected from the group consisting of and electrical and a magnetic driving force,
- wherein, for the electrical driving force, the deposition compound is a charged compound subjected to an applied electric field, and
- wherein, for the magnetic driving force, the deposition compound is a magnetic compound or a magnetically tagged compound subjected to a magnetic field.
A method of nanolithography, comprising:
- providing a substrate;
- providing a scanning probe microscope tip;
- coating the tip with a deposition compound;
- and
- subjecting said coated tip to a driving force to deliver said deposition compound to said substrate so as to produce a desired pattern;
- wherein the driving force is selected from the group consisting of an electrical and a magnetic driving force,
- wherein, for the electrical driving force, the deposition compound is a charged biomolecule subjected to an applied electric field, and
- wherein, for the magnetic driving force, the deposition compound is a magnetic compound or a magnetically tagged compound subjected to a magnetic field.
Dependencies are inferred from the claim text.