# US 7,744,358 B2 · Pattern transfer device and pattern transfer method

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- Number: US 7,744,358 B2
- Document ID: US7744358B2
- Status: Granted
- Kind: B2
- Application number: 10/594,893
- Filed: 2005-03-15
- Published: 2007-07-19
- Granted: 2010-06-29
- Earliest claimed: 2004-03-30
- Assignees: Pioneer Corporation
- Inventors: Osamu Kasono
- Web page: https://patentgrep.com/patent/US7744358B2

## CPC

- B29C 59/02: by mechanical means, e.g. pressing {(B29C59/007 takes precedence; embossing expanded porous articles B29C44/5627)}
- G11B 7/263: {Preparing and using a stamper, e.g. pressing or injection molding substrates (production of optical record carriers, e.g. optical discs B29D17/005)}
- Y10S 425/033: Magnet
- Y10S 425/81: Sound record
- B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00)
- G11B: INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER (recording measured values in a way that does not require playback through a transducer G01D9/00; recording or playback apparatus using mechanically marked tape, e.g. punched paper tape, or using unit records, e.g. punched or magnetically marked cards G06K; transferring data from one type of record carrier to another G06K1/18; circuits for coupling output of reproducer to radio receiver H04B1/20; gramophone pick-ups or like acoustic electromechanical transducers or circuits therefor H04R)
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

An object is to transfer a concavo-convex pattern formed on the surface of a transfer die onto a transfer target accurately. A pattern transfer apparatus according to the present invention is one for putting a transfer die having a concavo-convex pattern against a transfer target on a substrate to transfer the concavo-convex pattern onto a surface of the transfer target. It is characterized by comprising pressing means for pressing the transfer die against the transfer target on the substrate at a plurality of different locations independently.

## Claims

### Claim 1

A pattern transfer apparatus for putting a transfer die having a concavo-convex pattern against a transfer target on a substrate to transfer the concavo-convex pattern onto a surface of said transfer target, wherein at least part of said transfer die is made of a ferromagnetic material; the pattern transfer apparatus comprising:
first pressing means for putting the transfer die onto the surface of said transfer target, said first pressing means including magnetic force generating means for generating a magnetic force and having at least two or more electromagnets which are provided to near said substrate;
wherein said magnetic force generating means applies a magnetic force to said transfer die with said substrate interposed therebetween, thereby pressing said transfer die against said substrate,
the pattern transfer apparatus further comprising second pressing means for pressing said transfer die against a transfer target on said substrate uniformly, wherein said second pressing means includes: pressure applying means; and a balloon for transmitting a pressure of said pressure applying means to said transfer die.

### Claim 2 (depends on 1)

The pattern transfer apparatus according to claim 1, wherein said pressing means includes a current controller for adjusting the amounts of current to flow through said electromagnets, respectively.

### Claim 3 (depends on 2)

The pattern transfer apparatus according to claim 2, comprising: measuring means for measuring a distance between said substrate and said transfer die in at least two or more measuring points; and control means for receiving signals on the measuring points and the measured distances from said measuring means, determining currents to be applied to said respective electromagnets so that the measured distances at the measuring points become a predetermined value, and transmitting a signal to said current controller.

### Claim 4 (depends on 3)

The pattern transfer apparatus according to claim 3, wherein said measuring means is a distance measuring device using laser reflection.

### Claim 5 (depends on 3)

The pattern transfer apparatus according to claim 3, wherein said measuring means is a distance measuring device using ultrasonic reflection.

### Claim 6 (depends on 3)

The pattern transfer apparatus according to claim 3, wherein said measuring means is a distance measuring device using a change in capacitance.

### Claim 7 (depends on 1)

The pattern transfer apparatus according to claim 1, wherein said magnetic force generating means further has at least two or more permanent magnets which are embedded in a flat plate above the transfer die and are thus incapable of applying a magnetic force to the die with the substrate interposed therebetween, wherein the flat plate is made of light-transmitting materials and not made of a ferromagnetic material.

### Claim 8 (depends on 7)

The pattern transfer apparatus according to claim 7, wherein said permanent magnets are placed so as to correspond to the positions of the electromagnets.