# US 7,744,328 B2 · Apparatus for aligning a tray and tray holder > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,744,328 B2 - Document ID: US7744328B2 - Status: Granted - Kind: B2 - Application number: 11/324,609 - Filed: 2006-01-04 - Published: 2006-09-07 - Granted: 2010-06-29 - Earliest claimed: 2005-01-05 - Assignees: Samsung Mobile Display Co., Ltd. - Inventors: Sung Wha Jung; Sang Jin Han; Eu Gene Kang - Web page: https://patentgrep.com/patent/US7744328B2 ## CPC - C23C 14/042: {using masks} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) ## Abstract An apparatus for aligning a tray and tray holder, including a vertically positioned tray formed with coupling holes and a tray holder having coupling arms to couple with the coupling holes, and to prevent the bending of the tray and the tray holder. The tray includes a substrate frame that can receive a substrate, and the tray holder is coupled with a drive shaft for transferring the tray in the vertical position to a mask for vapor deposition. One end of a plurality of guide shafts securely contacts the rear side of the tray holder to prevent bending of the tray holder. The tray can have magnetic attaching members and the tray holder can have supporting members corresponding to the attaching members. The supporting members can magnetically couple with the attaching members in a position determined by corresponding grooves or protrusions to align the tray and tray holder. ## Claims ### Claim 1 An apparatus for aligning a tray and tray holder, comprising: a tray capable of receiving a substrate; a plurality of coupling holes formed in the tray, one of the plurality of coupling holes having a coupling protrusion; a tray holder; and a plurality of coupling arms coupled with the tray holder and extending away from the tray holder, one of the plurality of coupling arms corresponding to one of the plurality of coupling holes and having a coupling groove to engage the coupling protrusion, wherein the tray is coupled with the tray holder and can be transferred while positioned vertically when the coupling groove engages the coupling protrusion. ### Claim 2 (depends on 1) The apparatus for aligning a tray and tray holder of claim 1, wherein the coupling protrusion has an incline surface, and the coupling groove has an incline surface to contact the coupling protrusion incline surface when the coupling groove engages the coupling protrusion. ### Claim 3 (depends on 2) The apparatus for aligning a tray and tray holder of claim 2, wherein the coupling protrusion has a vertical surface, and the coupling groove has a vertical surface to contact the coupling protrusion vertical surface when the coupling groove engages the coupling protrusion. ### Claim 4 (depends on 1) The apparatus for aligning a tray and tray holder of claim 1, further comprising: a fixing holder member formed in the tray. ### Claim 5 (depends on 4) The apparatus for aligning a tray and tray holder of claim 4, wherein the tray holder comprises: a chuck for positioning the tray; a driving unit coupled with the chuck to drive the chuck; and a fixing and inserting member corresponding to the fixing holder member, wherein the fixing and inserting member couples with the fixing holder member to couple the tray with the tray holder. ### Claim 6 (depends on 4) The apparatus for aligning a tray and tray holder of claim 4, wherein the fixing holder member includes a through-hole formed by overlapping two rings with different diameters. ### Claim 7 (depends on 6) The apparatus for aligning a tray and tray holder of claim 6, wherein a ring with a smaller diameter is positioned above a ring with a larger diameter. ### Claim 8 (depends on 5) The apparatus for aligning a tray and tray holder of claim 5, wherein the fixing and inserting member has a groove for coupling the fixing and inserting member with the fixing holder member. ### Claim 9 (depends on 5) The apparatus for aligning a tray and tray holder of claim 5, wherein the tray further includes an attaching member, the tray holder further includes a supporting member corresponding to the attaching member, and the attaching member couples with the supporting member when the tray couples with the tray holder. ### Claim 10 (depends on 9) The apparatus for aligning a tray and tray holder of claim 9, wherein the attaching member comprises a conductive material. ### Claim 11 (depends on 10) The apparatus for aligning a tray and tray holder of claim 10, wherein the conductive material includes a magnetic material. ### Claim 12 (depends on 11) The apparatus for aligning a tray and tray holder of claim 11, wherein the attaching member includes at least one groove or protrusion. ### Claim 13 (depends on 12) The apparatus for aligning a tray and tray holder of claim 12, wherein the supporting member is made of magnetic material and can magnetically couple with the attaching member. ### Claim 14 (depends on 4) The apparatus for aligning a tray and tray holder of claim 4, wherein the tray comprises: a substrate frame for receiving and supporting a substrate, the tray capable of receiving and supporting the substrate frame. ### Claim 15 (depends on 14) The apparatus for aligning a tray and tray holder of claim 14, wherein the substrate frame further comprises: a substrate fixing piece for receiving and supporting the substrate. ### Claim 16 (depends on 15) The apparatus for aligning a tray and tray holder of claim 15, wherein the substrate frame further comprises: a frame fixing piece for coupling the substrate frame with the tray. ### Claim 17 (depends on 16) The apparatus for aligning a tray and tray holder of claim 16, wherein the tray further comprises: a transfer device for transferring the tray while in the vertical position. ### Claim 18 (depends on 17) The apparatus for aligning a tray and tray holder of claim 17, wherein the tray further comprises: a guide device positioned along the upper side surfaces of the tray. ### Claim 19 An apparatus for aligning a tray and tray holder, comprising: a tray holder, to which a tray can be coupled to position the tray vertically; and a supporting member for supporting the tray when the tray is coupled with the tray holder, wherein the supporting member extends toward the tray by a driving source, and wherein the driving source is positioned along an inner surface of a wall body of a vacuum chamber. ### Claim 20 An apparatus for aligning a tray and tray holder, comprising: a driving unit in which a tray holder is coupled with one end of a movable shaft driven by a driving source; a coupling part including coupling arms, the coupling arms coupled with the tray holder and capable of coupling with a vertically positioned tray; and a first guide shaft, wherein a first end of the first guide shaft is coupled with the tray holder, and the guide shaft prevents bending of the tray holder. ### Claim 21 (depends on 20) The apparatus for aligning a tray and tray holder of claim 20, further comprising: a second guide shaft, wherein the first guide shaft is positioned at the upper side of the tray holder and the second guide shaft is positioned at the lower side of the tray holder. ### Claim 22 (depends on 21) The apparatus for aligning a tray and tray holder of claim 21, further comprising: a connection plate coupled with the movable shaft, the first guide shaft, and the second guide shaft. ### Claim 23 (depends on 22) The apparatus for aligning a tray and tray holder of claim 22, wherein the driving source drives the movable shaft, the first guide shaft, and the second guide shaft simultaneously to move the same distance. ### Claim 24 (depends on 22) The apparatus for aligning a tray and tray holder of claim 22, wherein the first guide shaft are simultaneously driven by a separate driving source and are driven independently from the movable shaft. ### Claim 25 (depends on 20) The apparatus for aligning a tray and tray holder of claim 20, further comprising: a liquid magnetic seal, wherein the first guide shaft passes through a wall of a vacuum chamber and the liquid magnetic seal is positioned to maintain a vacuum in the vacuum chamber.