# US 7,743,730 B2 · Apparatus for an optimized plasma chamber grounded electrode assembly > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,743,730 B2 - Document ID: US7743730B2 - Status: Granted - Kind: B2 - Application number: 11/316,054 - Filed: 2005-12-21 - Published: 2007-06-21 - Granted: 2010-06-29 - Earliest claimed: 2005-12-21 - Assignees: Lam Research Corporation - Inventors: Arnold Kholodenko; Anwar Husain - Web page: https://patentgrep.com/patent/US7743730B2 ## CPC - H01J 37/32532: {Electrodes} - H01J 37/32055: {Arc discharge} - H01J 37/32082: {Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence)} - H01J 37/32091: {the radio frequency energy being capacitively coupled to the plasma} - H01J 37/32174: {Circuits specially adapted for controlling the RF discharge} - H01J 37/32458: {Vessel} - H01J 37/32559: {Protection means, e.g. coatings} - H01J 37/32577: {Electrical connecting means} - H01J 37/32651: {Shields, e.g. dark space shields, Faraday shields} - H01J 37/32724: {Temperature} - H10P 72/0421: {for drying etching} - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract An electrode assembly configured to provide a ground path for a plasma processing chamber of a plasma processing system is disclosed. The apparatus includes an electrode configured to be exposed to a plasma. The apparatus also includes a heater plate disposed above the electrode, wherein the heater plate is configured to heat the electrode. The apparatus further includes a cooling plate disposed above the heater plate, wherein the cooling plate is configured to cool the electrode. The apparatus also includes a plasma chamber lid configured to confine the plasma in the plasma chamber, wherein the plasma chamber lid includes a ground. The apparatus further includes a clamp ring configured to secure the electrode, the heater plate, and the cooling plate to the plasma chamber lid, the clamp ring is further configured to provide the ground path from the electrode to the chamber lid. ## Claims ### Claim 1 An electrode assembly configured to provide a ground path for a plasma processing chamber of a plasma processing system, said electrode assembly comprising: an electrode configured to be exposed to a plasma; a heater plate disposed above said electrode, wherein said heater plate is configured to heat said electrode; a cooling plate disposed above said heater plate, wherein said cooling plate is configured to cool said electrode; a plasma chamber lid configured to confine said plasma in said plasma chamber, wherein said plasma chamber lid includes a ground; a clamp ring configured to secure said electrode to said plasma chamber lid, wherein said clamp ring and said electrode form a basket with at least said heater plate being placed inside said basket such that said clamp ring surrounds said heater plate, said basket is configured to allow longitudinal and lateral tolerances for thermal expansion of said heater plate from repetitive thermal cycling, said clamp ring being further configured to provide said ground path from said electrode to said chamber lid; and a shield shielding at least a portion of a bottom of said clamp ring, said portion of said bottom of said clamp ring being disposed between said shield and said electrode, said shield including a ledge disposed under said portion of said bottom of said clamp ring, said portion of said clamp ring disposed under an outer annular portion of said electrode. ### Claim 2 (depends on 1) The electrode assembly of claim 1, wherein said clamp ring is disposed between said plasma chamber lid and said electrode. ### Claim 3 (depends on 1) The electrode assembly of claim 1, further including a backing plate disposed between said electrode and said heater plate, wherein said backing plate is configured to substantially electrically isolate said electrode from said heating plate. ### Claim 4 (depends on 1) The electrode assembly of claim 1, further including a first clamp ring electrical insulator disposed between said clamp ring and said heater plate, wherein said first clamp ring electrical insulator is configured to substantially electrically isolate said clamp ring from said heater plate. ### Claim 5 (depends on 1) The electrode assembly of claim 1, further including a second clamp ring electrical insulator disposed between said clamp ring and said cooling plate, wherein said second clamp ring electrical insulator is configured to substantially electrically isolate said clamp ring from said cooling plate. ### Claim 6 (depends on 1) The electrode assembly of claim 1, wherein said electrode includes a showerhead. ### Claim 7 (depends on 1) The electrode assembly of claim 1, wherein said electrode and said clamp ring are formed into a single unit. ### Claim 8 (depends on 1) The electrode assembly of claim 1, wherein said clamp ring is disposed between said electrode and said cooling plate. ### Claim 9 (depends on 1) The electrode assembly of claim 1, wherein said clamp ring comprises aluminum. ### Claim 10 (depends on 1) The electrode assembly of claim 1, further comprising an electrode sub-assembly, wherein said electrode sub-assembly includes at least said electrode, said heater plate, said cooling plate, said backing plate, and said clamp ring, and wherein said clamp ring is configured to function as a RF return path along an outer surface of said electrode sub-assembly within said plasma processing chamber. ### Claim 11 (depends on 1) The electrode assembly of claim 1, wherein said plasma processing system is one of an atmospheric plasma processing system, a low-pressure plasma processing system, an inductively coupled plasma processing system, and a capacitively coupled plasma processing system. ### Claim 12 An electrode assembly configured to provide a ground path for a plasma processing chamber of a plasma processing system, said electrode assembly comprising: an electrode configured to be exposed to a plasma; a set of components including at least a heater plate and a cooling plate; a plasma chamber lid configured to confine said plasma in said plasma chamber; a clamp ring configured to secure said electrode to said plasma chamber lid, wherein said clamp ring and said electrode form a basket with said set of components being placed inside said basket such that said clamp ring surrounds said heater plate, said basket is configured to allow longitudinal and lateral tolerances for thermal expansion of said set of components from repetitive thermal cycling, said clamp ring is further configured to provide said ground path from said electrode to said chamber lid; and a shield shielding at least a portion of a bottom of said clamp ring, said portion of said bottom of said clamp ring being disposed between said shield and said electrode, said shield including a ledge disposed under said portion of said bottom of said clamp ring, said portion of said clamp ring disposed under an outer annular portion of said electrode. ### Claim 13 (depends on 12) The electrode assembly of claim 12, wherein said clamp ring is disposed between said plasma chamber lid and said electrode. ### Claim 14 (depends on 12) The electrode assembly of claim 12, wherein said electrode includes a showerhead. ### Claim 15 (depends on 12) The electrode assembly of claim 12, wherein said electrode and said clamp ring are formed into a single unit. ### Claim 16 (depends on 12) The electrode assembly of claim 12, wherein said clamp ring comprises aluminum. ### Claim 17 (depends on 12) The electrode assembly of claim 12, wherein said plasma processing system is one of an atmospheric plasma processing system, a low-pressure plasma processing system, an inductively coupled plasma processing system, and a capacitively coupled plasma processing system. ### Claim 18 An electrode assembly configured to provide a ground path for a plasma processing chamber of a plasma processing system, said electrode assembly comprising: an electrode configured to be exposed to a plasma; a heater plate disposed above said electrode; a cooling plate disposed above said heater plate; a plasma chamber lid configured to confine said plasma in said plasma chamber, said plasma chamber lid being further configured to form a basket with said electrode and to provide said ground path, wherein said heater plate and said cooling plate are placed inside said basket such that said plasma chamber lid surrounds said heater plate and said cooling plate, said basket is configured to allow longitudinal and lateral tolerances for thermal expansion of said heater plate and said cooling plate from repetitive thermal cycling; and a shield shielding at least a portion of a bottom of said clamp ring, said portion of said bottom of said clamp ring being disposed between said shield and said electrode, said shield including a ledge disposed under said portion of said bottom of said clamp ring, said portion of said clamp ring disposed under an outer annular portion of said electrode. ### Claim 19 (depends on 18) The electrode assembly of claim 18, wherein said heater plate is configured to heat said electrode. ### Claim 20 (depends on 18) The electrode assembly of claim 18, wherein said cooling plate is configured to cool said electrode. ### Claim 21 (depends on 18) The electrode assembly of claim 18, wherein said electrode is one of a powered electrode and a grounded electrode. ### Claim 22 (depends on 18) The electrode assembly of claim 18, wherein said electrode includes a showerhead. ### Claim 23 (depends on 18) The electrode assembly of claim 18, wherein said plasma processing system is one of an atmospheric plasma processing system, a low-pressure plasma processing system, an inductively coupled plasma processing system, and a capacitively coupled plasma processing system.