Method for producing an optoelectronic component
AssigneeOSRAM Opto Semiconductors GmbH
InventorsFranz Eberhard, Uwe Strauss, Ulrich Zehnder, Andreas Weimar, Raimund Oberschmid
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AssigneeOSRAM Opto Semiconductors GmbH
InventorsFranz Eberhard, Uwe Strauss, Ulrich Zehnder, Andreas Weimar, Raimund Oberschmid
Estimating the term…
A method for producing an optoelectronic component is disclosed. The method includes the steps of providing a substrate, applying a semiconductor layer sequence to the substrate, applying at least two current expansion layers to the semiconductor layer sequence, applying and patterning a mask layer, patterning the second current expansion layer by means of an etching process during which sidewalls of the mask layer are undercut, patterning the first current expansion layer by means of an etching process during which the sidewalls of the mask layer are undercut at least to a lesser extent than during the patterning of the second current expansion layer, and removing the mask layer.
A method for producing an optoelectronic component, the method comprising the steps of:
Dependencies are inferred from the claim text.