Method and apparatus for analysis using X-ray spectra
AssigneeJEOL Ltd.
InventorKazuyasu Kawabe
Life of this patent
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Abstract
A method for precisely measuring and displaying the whole profile of an X-ray spectral waveform, which rises from a background level and finally returns to the background level after passing across a peak. X-rays are counted for a time interval of to at a spectral position, resulting in X-ray N counts not containing statistical fluctuations. A standard deviation Eo representing a variation accompanying the N counts is given by Sqrt(N). Where the variation is greater than a given magnitude (tolerance error Er for display) at a spectral position where the X-ray intensity is high, X-rays are counted for a time interval of tm longer than the time interval to, producing increased counts Nm.
Claims14
A method of X-ray analysis using an X-ray spectrum obtained by a wavelength-dispersive X-ray spectrometer that detects and spectrally disperses X-rays produced from a sample irradiated with a beam of charged particles or X-rays, said method comprising the steps of:
- making variable a time for which X-rays are counted at each spectral position;
- converting obtained X-ray counts into X-ray counts to be collected per given count time in such a way that the magnitude of variation caused by statistical fluctuations of the X-ray counts to be collected per given count time is made equal to or less than a previously specified tolerance value at any spectral position;
- and
- obtaining the X-ray spectrum using the X-ray counts obtained by the conversion.
An X-ray analysis apparatus using an X-ray spectrum obtained by a wavelength-dispersive X-ray spectrometer that detects and spectrally disperses X-rays produced from a sample irradiated with a beam of charged particles or X-rays,
- wherein a time for which X-rays are counted at each spectral position is made variable,
- wherein obtained X-ray counts are converted into X-ray counts to be collected per given count time in such a way that the magnitude of variation caused by statistical fluctuations of the X-ray counts to be collected per given count time is made equal to or less than a previously specified tolerance value at any spectral position, and
- wherein the X-ray spectrum is obtained using the X-ray counts obtained by the conversion.
Dependencies are inferred from the claim text.