Magnetic transducer with milling mask
AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorsTsung Yuan Chen, David Patrick Druist, Quang Le, Kim Y. Lee, Chun-Ming Wang, Howard Gordon Zolla
Life of this patent
Estimating the term…
Loading patent…
AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorsTsung Yuan Chen, David Patrick Druist, Quang Le, Kim Y. Lee, Chun-Ming Wang, Howard Gordon Zolla
Estimating the term…
A method for fabricating a magnetic head with a trapezoidal shaped pole piece tip is described. The body of the main pole piece is deposited; then one or more layers for the pole piece tip are deposited. A bed material is deposited over the pole piece tip material. A void is formed in the bed material over the area for the pole piece tip. The void is filled with an ion-milling resistant material such as alumina preferably using atomic layer deposition or atomic layer chemical vapor deposition. The excess ion-milling resistant material and the bed material are removed. The result is an ion-milling mask formed over the area for the pole piece tip. Ion milling is then used to remove the unmasked material in the pole piece tip layer and to form a beveled pole piece tip and preferably a beveled face on the main pole piece.
A magnetic head comprising:
A magnetic head comprising:
A magnetic head comprising:
Dependencies are inferred from the claim text.