Precision laser machining apparatus
AssigneeMichael J. Scaggs
InventorsMichael J. Scaggs, Thomas Schoelzel
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Abstract
A focused laser beam having an optical axis passes sequentially through a simple, positive lens, a pair of plane, parallel windows, and a second, simple, negative lens. Each of the plane, parallel windows are mounted to a galvanometer motor and positioned orthogonally to one another. The focused laser beam is therefore displaced in a controlled manner from the optical axis to enable laser machining of very precise geometric features over a large processing window. A field size of one thousand microns is achieved.
Claims2
A device for laser machining very precise geometric features over a large processing window, comprising:
- a simple, positive lens;
- a pair of plane, parallel windows;
- each of said plane, parallel windows being mounted to a galvanometer motor and being positioned orthogonally to one another;
- a second, simple, negative lens;
- a laser beam having an optical axis;
- said laser beam adapted to pass sequentially through said simple, positive lens, through said pair of plane, parallel windows, and through said second, negative lens;
- whereby a focused laser beam is displaced in a controlled manner from said optical axis;
- and
- whereby a field size of one thousand microns is achieved.
Dependencies are inferred from the claim text.