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US 7,742,163 B2Granted
Field replaceable units (FRUs) optimized for integrated metrology (IM)
AssigneeTokyo Electron Limited
InventorShifang Li
Life of this patent
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Abstract
An Integrated Metrology Sensor (IMS) including a plurality of Field Replaceable Units (FRUs) for measuring a target on a wafer. The FRU configurations can be optimized to include the appropriate elements, so that each FRU can be pre-aligned and calibrated in the factory to minimize the time need to swap the FRU in the field due to failure or scheduled maintenance. The FRU configuration of the IMS is optimized to shorten the time to repair a failure or perform scheduled maintenance and increase the system reliability.
Claims17
A Integrated Metrology Sensor (IMS) comprising:
- a compact chassis assembly having a plurality of pre-aligned mounting devices configured for mounting a plurality of calibrated Field Replaceable Units (FRUs) at pre-determined locations, wherein the calibrated FRUs are assembled, aligned, and calibrated to meet a set characterization parameters;
- a calibrated wafer-positioning FRU removably coupled to the compact chassis assembly and configured for supporting and aligning a wafer;
- a calibrated high angle focusing FRU configured to provide one or more pre-aligned high-angle incident beams to a target on the wafer, the calibrated high angle focusing FRU being removably coupled to the calibrated wafer-positioning FRU and the compact chassis assembly;
- a calibrated high angle collecting FRU configured to receive one or more pre-aligned high-angle reflected beams from the target on the wafer, the calibrated high angle focusing FRU being removably coupled to the calibrated wafer-positioning FRU and the compact chassis assembly;
- a calibrated source FRU removably coupled to the compact chassis assembly and configured to provide at least one pre-aligned high angle input beam to the calibrated high angle focusing FRU;
- and
- a calibrated analyzer FRU removably coupled to the compact chassis assembly and configured to receive at least one pre-aligned high angle output beam.
4 more elements
Dependencies are inferred from the claim text.