Prober for testing magnetically sensitive components
AssigneeSUSS MicroTec Test Systems GmbH
InventorsSebastian Giessmann, Stefan Kreissig, Stojan Kanev
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Abstract
A prober for testing components comprises a lower frame, over which a probe holder plate is disposed at a distance therefrom for receiving test probes that make contact with the components to be tested and to which a displacement device is connected. A substrate carrier is disposed in the space between the frame and the probe holder plate, and the probe holder plate is provided with an opening, below which the substrate carrier can be displaced. To expand the scope of application of probers used for testing components, all those components of the prober that surround the substrate are made from a non-magnetic material.
Claims12
Prober for testing components, comprising:
- a lower frame, a probe holder plate disposed over and at a distance from the lower frame for receiving test probes that make contact with the components and to which a displacement device is connected, a substrate carrier disposed in a space between the frame and the probe holder plate, the substrate carrier being adapted to be displaced below an opening in the probe holder plate, wherein all components of the prober surrounding a substrate on the substrate carrier are made of a non-magnetic material.
Dependencies are inferred from the claim text.