System and method for de-embedding a device under test employing a parametrized netlist

A system for extracting a device parameter of a device under test (DUT) embedded in a device test structure (DTS), said system comprising:

• said DTS embedding said device under test (DUT);
• at least one calibration standard for said DUT;
• scattering parameter (S-parameter) measurement means for measuring S-parameters of said DTS and said at least one calibration standard at multiple frequencies;
• a parameterized netlist containing a first lumped element network and a second lumped element network, wherein said first lumped element network represents pad set parasitics of said DTS and has at least one first parameterized lumped element, and wherein said second lumped element network represents said DUT and has at least one second parameterized lumped element;
• S-parameter fitting means for fitting measured S-parameters of said DTS and said at least one calibration standard with said at least one first parameterized lumped element and said at least one second parameterized lumped element;
• and
• DUT parameter extraction means for calculating said device parameter from fitted parameterized lumped element values for each of said at least one first parameterized lumped element and said at least one second parameterized lumped element.

A method for extracting pad set parasitics from a device test structure (DTS), said method comprising:

• providing said DTS embedding a device under test (DUT);
• providing at least one calibration standard for said DUT;
• measuring S-parameters of said DTS and said at least one calibration standard at multiple frequencies;
• generating a parameterized netlist representing said pad set parasitics and containing a lumped element network having at least one parameterized lumped element;
• fitting measured S-parameters of said DTS and said at least one calibration standard with said at least one parameterized lumped element;
• calculating a 4-port Y-parameter of said parameterized netlist from a fitted parameterized lumped element value for each of said at least one parameterized lumped element;
• and
• calculating a 2-port Y-parameter of the DUT using said 4-port Y-parameter of said parameterized netlist.

A method for extracting a device parameter of a device under test (DUT) embedded in a device test structure (DTS), said method comprising:

• providing said DTS embedding said device under test (DUT);
• providing at least one calibration standard for said DUT;
• measuring S-parameters of said DTS and said at least one calibration standard at multiple frequencies;
• generating a parameterized netlist containing a first lumped element network and a second lumped element network, wherein said first lumped element network represents pad set parasitics of said DTS and has at least one first parameterized lumped element, and wherein said second lumped element network represents said DUT and has at least one second parameterized lumped element;
• fitting measured S-parameters of said DTS and said at least one calibration standard with said at least one first parameterized lumped element and said at least one second parameterized lumped element;
• and
• calculating said device parameter from fitted parameterized lumped element values for each of said at least one first parameterized lumped element and said at least one second parameterized lumped element.