Ionization vacuum gauge
AssigneeMori Patent Office
InventorsFumio Watanabe, Reiki Watanabe
Life of this patent
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Abstract
An ionization vacuum gauge which has at least three electrodes of a grid (2), an electron source (3) and an ion collector (1) in a vacuum vessel (4) connected in communication with a vacuum apparatus, oscillates electrons emitted front the electron source (3) within and outside of the grid (2), ionizes gas molecules flying into the grid (2) by the oscillated electrons, supplements the ionized ions by the ion collector (1) to convert into a current signal, and measures a gas molecular density (pressure) in the vacuum apparatus according to the obtained current intensity, wherein the ion collector (1) is provided with a heating device for heating the ion collector.
Claims11
An ionization vacuum gauge, comprising:
- a vacuum vessel,
- an electron source which is disposed in the vacuum vessel to emit electrons,
- a grid which is provided in the vacuum vessel to oscillate the electrons emitted from the electron source and to ionize gas molecules by the electrons,
- an ion collector which is provided in the vacuum vessel to supplement the ionized gas molecules to convert to a current signal, and to measure a gas molecular density (pressure) from the obtained current intensity, and
- a first heating device which is provided in the ion collector to heat the ion collector,
- wherein the grid is formed of a metallic resistor, both ends of the grid are connected to two vacuum terminals, other ends of the two vacuum terminals are connected to a first power supply for heating the grid, and the grid has a second heating device capable of heating independently the grid by the first power supply.
Dependencies are inferred from the claim text.