Micro-electromechanical system (MEMS) based current and magnetic field sensor using tunneling current sensing

An apparatus comprising:

• a micro-electro-mechanical system (MEMS)-based magnetic field sensing component having a magneto-MEMS component configured to sense a magnetic field produced by an electrical current flowing in a conductor;
• a tunneling current circuit associated with the magneto-MEMS component and configured to provide an indication of the electrical current flowing in the conductor based on the sensed magnetic field, wherein the tunneling current circuit comprises a tunneling current generator configured to generate a tunneling current between a fixed element and a moving element;
• and
• a magnetic-to-mechanical converter coupled to the moving element.

A method comprising:

• generating a tunneling current between a fixed element and a moving element of a MEMS current sensor, wherein the moving element is movable relative to the fixed element responsive to a magnetic field produced by an electrical current flowing in a conductor;
• identifying a change in the tunneling current responsive to movement of the moving element away from a position relative to the fixed element;
• and
• providing an indication of a strength of the magnetic field responsive to the change in the tunneling current.