Recess-protrusion structure body, process for producing the same, piezoelectric device, and ink jet type recording head

A recess-protrusion structure body, comprising a base plate and at least one protruding region formed on the base plate, produced by a process comprising:

• i) a step (A) of forming a selectively removable resist layer or a selectively removable sacrifice layer in a predetermined pattern in a protrusion non-forming region on the base plate,
• ii) a step (B) of forming a pillar-shaped structure film on a side of the base plate, on which side the resist layer or the sacrifice layer has been formed in the predetermined pattern, the pillar-shaped structure film containing a plurality of pillar-shaped bodies, each of which has a smaller diameter than the at least one protruding region, and extends in a direction nonparallel with a base plate surface of the base plate, and
• iii) a step (C) of removing the resist layer or the sacrifice layer, and a region of the pillar-shaped structure film, which region is located on the resist layer or the sacrifice layer, by use of a lift-off technique,
• whereby the at least one protruding region, which contains the plurality of the pillar-shaped bodies, is formed.

A recess-protrusion structure body, comprising:

• i) a base plate, and
• ii) at least one protruding region, which has been formed on the base plate,
• the at least one protruding region having been formed with patterning processing performed on a pillar-shaped structure film containing a plurality of pillar-shaped bodies, each of which has a smaller diameter than the width of the at least one protruding region and extends in a direction nonparallel with a base plate surface of the base plate,
• each of the plurality of the pillar-shaped bodies, which are exposed at a side face of the protruding region, being terminated at an interface of the pillar-shaped body.