Polymer bulk acoustic resonator
OwnerSei-Joo Janginventor
Life of this patent
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Abstract
A polymer bulk acoustic resonator that includes an active semiconductor layer, a first thin film electrode layer applied to the semiconductor layer, a thin film electro-active polymer layer applied to the first thin film electrode layer; and a second thin film electrode layer applied to the thin film electro-active polymer layer.
Claims14
The method of making a polymer bulk acoustic resonator comprising;
- applying a first thin film electrode layer to a semiconductor layer;
- applying a thin film electro-active polymer layer to the first thin film electrode layer;
- and
- applying a second thin film electrode layer applied to the thin film electro-active polymer layer, further including configuring the semiconductor layer as a switch and the electro-active polymer layer as a frequency signal filter.
The method of making a polymer bulk acoustic resonator comprising;
- applying a first thin film electrode layer to a semiconductor layer;
- applying a thin film electro-active polymer layer to the first thin film electrode layer;
- and
- applying a second thin film electrode layer applied to the thin film electro-active polymer layer, further including configuring the semiconductor layer as an amplifier and the electro-active polymer layer as a frequency signal filter.
The method of making a polymer bulk acoustic resonator comprising;
- applying a first thin film electrode layer to a semiconductor layer;
- applying a thin film electro-active polymer layer to the first thin film electrode layer;
- and
- applying a second thin film electrode layer applied to the thin film electro-active polymer layer, further including configuring the semiconductor layer as a signal processor and the electro-active polymer layer as a frequency signal filter.
The method of making a polymer bulk acoustic resonator comprising;
- applying a first thin film electrode layer to a semiconductor layer;
- applying a thin film electro-active polymer layer to the first thin film electrode layer;
- and
- applying a second thin film electrode layer applied to the thin film electro-active polymer layer, wherein the first thin film electrode layer, the thin film electro-active polymer layer and the second thin film electrode layer are applied using the technique of spin casting.
The method of making a polymer bulk acoustic resonator comprising;
- applying a first thin film electrode layer to a semiconductor layer;
- applying a thin film electro-active polymer layer to the first thin film electrode layer;
- and
- applying a second thin film electrode layer applied to the thin film electro-active polymer layer, wherein the first thin film electrode layer, the thin film electro-active polymer layer and the second thin film electrode layer are applied using the technique of evaporation to form the layers.
Dependencies are inferred from the claim text.