Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control

A multi-chambered excimer or molecular halogen gas discharge laser system comprising at least one oscillator chamber and at least one amplifier chamber producing oscillator output laser light pulses that are amplified in the at least one power chamber, having a fluorine injection control system comprising:

• a halogen gas consumption estimator
• estimating the amount of halogen gas that has been consumed in one of the at least one oscillator and at least one amplifier chamber by executing a formula having an input comprising the difference between an operating parameter of the at least one oscillator chamber and the at least one amplifier chamber, and
• estimating the amount of halogen gas that has been consumed in the other of the at least one oscillator chamber and amplifier chamber, and
• producing an output representative of an estimated halogen gas consumption in the at least one oscillator chamber and in the at least one amplifier chamber.

A multi-chambered excimer or molecular halogen gas discharge laser system comprising at least one oscillator chamber and at least one amplifier chamber producing oscillator output laser light pulses that are amplified in the at least one power chamber, having a fluorine injection control system comprising:

• a halogen gas consumption estimator
• estimating the amount of halogen gas that has been consumed in one of the at least one oscillator and at least one amplifier chamber by executing a formula having an input comprising an operating parameter of the other of the at least one oscillator chamber and the at least one amplifier chamber, and
• estimating the amount of halogen gas that has been consumed in the other of the at least one oscillator chamber and amplifier chamber, and
• producing an output representative of an estimated halogen gas consumption in the at least one oscillator chamber and in the at least one amplifier chamber.

A multi-chambered excimer or molecular halogen gas discharge laser system comprising at least one oscillator chamber and at least one amplifier chamber producing oscillator output laser light pulses that are amplified in the at least one amplifier chamber, having a fluorine injection control system comprising:

• a halogen gas consumption estimating means for:
• estimating the amount of halogen gas that has been consumed in one of the at least one oscillator chamber by executing a formula having inputs comprising at least a first operating parameter of one of the least one oscillator chamber and the at least one amplifier chamber, and
• the difference between a second operating parameter of the at least one oscillator chamber and the at least one amplifier chamber, and
• estimating the amount of halogen gas that has been consumed in the other of the at least one oscillator chamber and the at least one amplifier chamber by executing a formula having an input comprising at least a third operating parameter of the other of the at least one oscillator chamber and the at least one amplifier chamber, and
• producing an output representative of an estimated halogen gas consumption in the at least one oscillator chamber and of the halogen gas consumption in the at least one amplifier chamber.

A multi-chambered excimer or molecular halogen gas discharge laser system comprising at least one oscillator chamber and at least one amplifier chamber producing oscillator output laser light pulses that are amplified in the at least one power chamber, having a fluorine injection control system comprising:

• a halogen gas consumption estimator means for:
• estimating the amount of halogen gas that has been consumed in one of the at least one oscillator and at least one amplifier chamber by executing a formula having an input comprising the difference between an operating parameter of the at least one oscillator chamber and the at least one amplifier chamber, and
• estimating the amount of halogen gas that has been consumed in the other of the at least one oscillator chamber and amplifier chamber, and
• producing an output representative of an estimated halogen gas consumption in the at least one oscillator chamber and in the at least one amplifier chamber.

A multi-chambered excimer or molecular halogen gas discharge laser system comprising at least one oscillator chamber and at least one amplifier chamber producing oscillator output laser light pulses that are amplified in the at least one amplifier chamber, having a fluorine injection control system comprising:

• a halogen gas consumption estimator means for:
• estimating the amount of halogen gas that has been consumed in one of the at least one oscillator and at least one amplifier chamber by executing a formula having an input comprising an operating parameter of the other of the at least one oscillator chamber and the at least one amplifier chamber, and
• estimating the amount of halogen gas that has been consumed in the other of the at least one oscillator chamber and amplifier chamber, and
• producing an output representative of an estimated halogen gas consumption in the at least one oscillator chamber and in the at least one amplifier chamber.

A method using a multi-chambered excimer or molecular halogen gas discharge laser system comprising at least one oscillator chamber and at least one amplifier chamber for producing oscillator output laser light pulses that are amplified in the at least one amplifier chamber, having a fluorine injection control system comprising:

• using a halogen gas consumption estimator:
• estimating the amount of halogen gas that has been consumed in one of the at least one oscillator chamber by executing a formula having inputs comprising at least a first operating parameter of one of the least one oscillator chamber and the at least one amplifier chamber, and
• the difference between a second operating parameter of the at least one oscillator chamber and the at least one amplifier chamber, and
• estimating the amount of halogen gas that has been consumed in the other of the at least one oscillator chamber and the at least one amplifier chamber by executing a formula having an input comprising at least a third operating parameter of the other of the at least one oscillator chamber and the at least one amplifier chamber, and
• producing an output representative of an estimated halogen gas consumption in the at least one oscillator chamber and of the halogen gas consumption in the at least one amplifier chamber.

A method using multi-chambered excimer or molecular halogen gas discharge laser system comprising at least one oscillator chamber and at least one amplifier chamber for producing oscillator output laser light pulses that are amplified in the at least one power chamber, having a fluorine injection control system comprising:

• using a halogen gas consumption estimator:
• estimating the amount of halogen gas that has been consumed in one of the at least one oscillator and at least one amplifier chamber by executing a formula having an input comprising the difference between an operating parameter of the at least one oscillator chamber and the at least one amplifier chamber, and
• estimating the amount of halogen gas that has been consumed in the other of the at least one oscillator chamber and amplifier chamber, and
• producing an output representative of an estimated halogen gas consumption in the at least one oscillator chamber and in the at least one amplifier chamber.

A method using a multi-chambered excimer or molecular halogen gas discharge laser system comprising at least one oscillator chamber and at least one amplifier chamber for producing oscillator output laser light pulses that are amplified in the at least one amplifier chamber, having a fluorine injection control system comprising:

• using a halogen gas consumption estimator:
• estimating the amount of halogen gas that has been consumed in one of the at least one oscillator and at least one amplifier chamber by executing a formula having an input comprising an operating parameter of the other of the at least one oscillator chamber and the at least one amplifier chamber, and
• estimating the amount of halogen gas that has been consumed in the other of the at least one oscillator chamber and amplifier chamber, and
• producing an output representative of an estimated halogen gas consumption in the at least one oscillator chamber and in the at least one amplifier chamber.