Multi-beam modulator for a particle beam and use of the multi-beam modulator for the maskless structuring of a substrate
AssigneeVistec Electron Beam GmbH
InventorsHans-Joachim Doering, Joachim Heinitz
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Abstract
The invention discloses a multibeam modulator which generates a plurality of individual beams from a particle beam. The particle beam illuminates the multibeam modulator at least partially over its surface. The multibeam modulator comprises a plurality of aperture groups composed of aperture row groups. The totality of all aperture rows defines a matrix of m×n cells, where m cells form a row, and k openings are formed in each row. The density of openings within a row is inhomogeneously distributed.
Claims22
A multibeam modulator which generates a plurality of individual beams from a particle beam, the particle beam illuminating said multibeam modulator at least partially over a surface thereof, said multibeam modulator comprising:
- a plurality of openings having equal size, each opening being arranged in a cell of a matrix of m×n cells;
- wherein the matrix comprises:
- a number m of matrix columns, each with a number n of cells;
- and
- a number n of matrix rows, each with a number m of cells and a number k of openings;
- wherein a size of each cell of the matrix is equal to the size of one of the openings, such that each opening occupies the entire cell in which each opening is arranged;
- wherein all of the openings in each matrix row form an aperture row within a limited portion of each matrix row, such that a number of cells of each aperture row is less than the number m of cells of each matrix row;
- wherein the density of the k openings within each matrix row is inhomogeneously distributed;
- and
- wherein a distance between the k openings of a single matrix row is equal to an integer multiple of the size of one of the cells.
A method of using a multibeam modulator for maskless structuring of substrates, comprising the steps of:
- generating a plurality of individual beams in that a particle beam illuminates the multibeam modulator at least partially over its surface;
- and
- forming a plurality of equally sized openings in the multibeam modulator, such that each opening is arranged in a cell of a matrix of m×n cells;
- wherein the matrix comprises:
- a number m of matrix columns, each with a number n of cells;
- and
- a number n of matrix rows, each with a number m of cells and a number k of openings;
- wherein a size of each cell of the matrix is equal to the size of one of the openings, such that each opening occupies the entire cell in which each opening is arranged;
- wherein all of the openings in each matrix row form an aperture row within a limited portion of each matrix row, such that a number of cells of each aperture row is less than the number m of cells of each matrix row;
- wherein the density of the k openings within each matrix row is inhomogeneously distributed;
- and
- wherein a distance between the k openings of a single matrix row is equal to an integer multiple of the size of one of the cells.
Dependencies are inferred from the claim text.