Semiconductor device with multilayered metal pattern

A method for fabricating a semiconductor device, said method comprising the steps of:

• forming a first insulating film on a semiconductor substrate;
• forming a first metal layer on the first insulating film;
• patterning the first metal layer to form at least one first interconnect and a first pad;
• forming a second insulating film on the first interconnect and the first pad;
• forming, in the second insulating film, at least one hole-like first opening exposing the first interconnect and a trench-like second opening exposing the first pad;
• in a common step, filling the first opening with a metal to form at least one first via connected to the first interconnect and filling the second opening with the metal to form a network via connected to the first pad;
• forming a second metal layer on the second insulating film, the first via and the network via;
• and
• patterning the second metal layer to form at least one second interconnect connected to the first via and a second pad connected to the network via,
• wherein the network via is a single continuous structure having a honeycomb structure.