Method of fabricating a biosensor
AssigneeHewlett-Packard Development Company, L.P.
InventorManish Sharma
Life of this patent
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Abstract
The present invention provides a method of fabricating a biosensor. The method includes providing a substrate which has a surface coating. The surface coating is deformable and the substrate includes a layered structure which has at least two electrically conductive layers separated by at least one electrically insulating layer. The method also includes imprinting a structure into the surface coating. Further, the method includes etching at least a region of the imprinted structure and the substrate to remove at least a portion of the structure and the substrate. The structure is shaped so that the etching forms at least a portion of the biosensor in the substrate and exposes at least a portion of each electrically conductive layer to form electrodes of the biosensor.
Claims13
A method of fabricating a biosensor, the method comprising:
- providing a substrate with a surface coating, the surface coating being deformable and the substrate comprising a layered structure, the layered structure comprising at least two electrically conductive layers separated by at least one electrically insulating layer;
- imprinting a structure into the surface coating;
- and
- etching at least a region of the imprinted structure and the substrate to remove at least a portion of the structure and the substrate to form a projection;
- wherein the structure is shaped so that the etching forms at least a portion of the biosensor in the substrate and exposes at least a portion of each electrically conductive layer to form electrodes of the biosensor.
Dependencies are inferred from the claim text.