US 7,740,992 B2 · Exposure apparatus, exposure method, and exposure mask

Abstract

An exposure apparatus to be used with an exposure mask having an elastically deformable holding member and a light blocking film provided on the holding member and being formed with an opening pattern. For exposure, the mask is flexed, to be brought into contact with an object to be exposed. The apparatus includes a distance detecting device for detecting a distance between the exposure mask and the object to be exposed. The distance detecting device is adapted to detect the distance between the exposure mask and the object to be exposed before the exposure mask is flexed. The apparatus also includes a distance controlling device for controlling the distance between the exposure mask before the mask is flexed and the object to be exposed, on the basis of a signal from the distance detecting device.

Claims1

Dependent claims

An exposure method, wherein for exposure, an exposure mask having an elastically deformable holding member and a light blocking film, provided on the holding member and being formed with an opening pattern, is flexed to be brought into contact with an object to be exposed, said method comprising the steps of:

detecting a first distance between the exposure mask and the object to be exposed, before the exposure;
bringing the exposure mask into contact with the object and detecting a deformation value of the opening pattern of the mask;
disengaging the exposure mask from the object and bringing the exposure mask close to the object up to a second distance from the object, so as to compensate for the deformation value;
and
exposing the object with the exposure mask using light from a light source.

2 more elements

Dependencies are inferred from the claim text.

Exposure apparatus, exposure method, and exposure mask

Life of this patent

Exposure apparatus, exposure method, and exposure mask

Life of this patent

Abstract

Claims1