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US 7,740,901 B2Granted
Low temperature method of making a zinc oxide coated article and the coated article made thereby
AssigneesPilkington Group Limited, Arkema Inc.
InventorsMichael B. Abrams, Roman Y. Korotkov, Gary S. Silverman, Ryan C. Smith, Jeffery L. Stricker
Life of this patent
Estimating the term…
Abstract
An atmospheric chemical vapor deposition method of making a zinc oxide coated glass article, made by directing one or more streams of gaseous reactants, specifically a zinc containing compound, and an oxygen containing compound, onto a surface of a transparent substrate material heated to a temperature of 400° C. or less.
Claims16
A method of making a low resistivity zinc oxide coated transparent article comprising:
- providing a moving transparent substrate having a surface on which a coating is to be applied, the surface being at a temperature of 400° C. or less;
- and
- directing a precursor mixture formed in a gas mixing chamber, the precursor mixture comprising a zinc containing compound and one or more oxygen containing compounds, out of the gas mixing chamber to the surface on which the coating is to be deposited, the zinc containing compound and oxygen sources having been mixed together in the gas mixing chamber for a time <500 msec. before the precursor mixture exits the gas mixing chamber and contacts the surface of the substrate so that a zinc oxide coating is formed at atmospheric pressure on the surface at a deposition rate of at least 5 nm/second.
Dependencies are inferred from the claim text.