Method for purification of disilicon hexachloride and high purity disilicon hexachloride
AssigneeToagosei Co., Ltd.
InventorsKoji Ishikawa, Hiroshi Suzuki, Yoshinori Kimata
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Abstract
The objective of the present invention is to provide a method for obtaining a high purity disilicon hexachloride by removing a silanol with good efficiency from a disilicon hexachloride material containing the silanol as an impurity. The purification method for disilicon hexachloride of the present invention comprises a process for contacting a disilicon hexachloride material containing disilicon hexachloride and a silanol as an impurity with an adsorbent material such as activated carbon to remove the silanol. The method may further comprise a distillation process. The above processes are preferably performed in an atmosphere of an inert gas.
Claims17
A method for purifying disilicon hexachloride, the method comprising contacting a disilicon hexachloride material, comprising disilicon hexachloride contacting a silicon chloride compound and a silanol as an impurity, with an active carbon absorbent material, at room temperature, to produce a partially purified disilicon hexachloride material, and distilling the partially purified disilicon hexachloride material to produce purified disilicon hexachloride.
Dependencies are inferred from the claim text.