Method of treating a gas stream
AssigneeEdwards Limited
InventorsJames Robert Smith, Gary Peter Knight
Life of this patent
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Abstract
A method of treating a gas stream containing silane or other silicon-containing gas is described, in which the gas stream is conveyed to a liquid ring pump or screw-mechanism pump, to which are also supplied an oxidant for oxidising the silicon-containing gas within the pump, and a liquid for forming a liquid ring or intermittent flushing within the pump. A liquid stream containing said liquid and a by-product of the oxidation of the silicon-containing gas is exhaust from the pump.
Claims33
A method of treating a gas stream containing a silicon-containing gas, the method comprising the steps of:
- conveying the gas stream to a pump;
- supplying to the pump an oxidant for oxidising the silicon-containing gas within the pump and a liquid;
- and
- exhausting from the pump said liquid containing a by-product of the oxidation of the silicon-containing gas
- wherein the liquid comprises water or an aqueous solution.
A method of treating a gas stream containing a pyrophoric gas, the method comprising the steps of:
- conveying the gas stream to a pump;
- supplying to the pump an oxidant for oxidising the pyrophoric gas within the pump and a liquid;
- and
- exhausting from the pump said liquid containing a by-product of the oxidation of the pyrophoric gas,
- wherein the liquid comprises water or an aqueous solution.
Apparatus for treating a gas stream containing a silicon-containing gas, the apparatus comprising:
- a pump for receiving the gas stream;
- supply means connected to the pump for supplying an oxidant for oxidising the silicon-containing gas within the pump, and a liquid;
- and
- conveying means connected to the pump for conveying from the pump liquid containing a by-product of oxidation of the silicon-containing gas within the pump
- wherein the liquid comprises water or an aqueous solution.
Dependencies are inferred from the claim text.