Methods and systems for purifying gases
AssigneePraxair Technology, Inc.
InventorsLloyd Anthony Brown, Thomas Justin Thompson
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Abstract
The present invention relates to methods and systems for purifying gases, such as for example semiconductor process gases. The invention more particularly relates to fluid purification methods and systems having improved heat transfer capabilities and controls such that the purified fluid produced from the process contains reduced impurity levels and/or exhibits more uniform concentrations within the final product. In another aspect of the invention, the activation time for adsorbent beds used in such processes and systems can be reduced.
Claims35
An adsorbent vessel having an inner surface and an outer surface, the vessel comprising:
- at least one adsorbent bed formed of at least one adsorbent;
- at least one plate in thermal contact with the inner surface of the vessel and formed of material having higher thermal conductivity than the thermal conductivity of the at least one adsorbent;
- an external heat exchanger in contact with the outer surface of the vessel to maintain a fluid being purified within an operating purification temperature range;
- and
- wherein the at least one plate is configured to transfer heat and/or cooling to and from the at least one adsorbent bed.
Dependencies are inferred from the claim text.