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US 7,740,345 B2Granted
Actuator device, liquid-jet head and liquid-jet apparatus
AssigneeSeiko Epson Corporation
InventorsMotoki Takabe, Koji Sumi, Motohisa Noguchi, Naoto Yokoyama, Takeshi Saito
Life of this patent
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Abstract
Disclosed is an actuator device which includes a vibration plate and a piezoelectric element. The vibration plate includes an elastic film which is made of silicon oxide (SiO2) and which is formed on a substrate while the piezoelectric element is formed on the vibration plate and including a lower electrode, a piezoelectric layer and an upper electrode. The vibration plate has such a stress as to give a tensile stress between 300 MPa and 500 MPa, inclusive, to the piezoelectric element that is in a state of being displaced.
Claims5
An actuator device comprising:
- a vibration plate including an elastic film which is made of silicon oxide (Si02) and which is formed on a substrate;
- and a piezoelectric element formed on the vibration plate and including a lower electrode, a piezoelectric layer, and an upper electrode, wherein the vibration plate has such a stress as to give a tensile stress between 300 MPa and 500 MPa, inclusive, to the piezoelectric element that is in a state of being displaced, wherein the vibration plate further includes an insulation film made of zirconium oxide (Zr02), and the insulation film has a thickness of not more than 1600 nm, while the elastic film is more than three times as thick as the insulation film.
Dependencies are inferred from the claim text.