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US 7,739,981 B2Granted
Liquid droplet ejection apparatus, method for forming pattern, and method for manufacturing electro-optic device
AssigneeSeiko Epson Corporation
InventorHirotsuna Miura
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Abstract
A liquid droplet ejection apparatus has a droplet ejecting portion and an energy beam radiating portion. The liquid droplet ejecting portion ejects droplets containing pattern forming material onto an ejection target surface. The energy beam radiating portion radiates an energy beam onto a boundary between the droplets that have been received by the ejection target surface at different timings so as to move boundary areas of the droplets. Accordingly, using the liquid droplet ejection apparatus, a pattern having an accurately defined shape can be formed.
Claims7
A liquid droplet ejection apparatus comprising:
- a liquid droplet ejecting portion that ejects droplets of liquid containing a pattern forming material onto an ejection target surface;
- and
- an energy beam radiating portion attached to the liquid droplet ejecting portion that radiates an energy beam onto a boundary between the droplets that have been received by the ejection target surface at different timings, thereby moving the liquid contained in boundary areas of the droplets,
- wherein, in the boundary between the droplets that have been received by the ejection target surface at the different timings, the boundary areas of the droplets overlap each other and thus form an overlapping area, and
- wherein the energy beam radiating portion includes a scanning mechanism, the scanning mechanism scanning the energy beam from the overlapping area toward a non-overlapping area, or non-boundary areas of the droplets so that the liquid contained in the overlapping area moves toward the non-overlapping area.
2 more elements
Dependencies are inferred from the claim text.