Flow sensor element and its self-cleaning

A method for self-cleaning of a flow sensor element, the method comprising fixing a temperature-measuring element and a heating element in an opening of a cover or a hollow body surface, providing the temperature-measuring element with a platinum thin-film resistor on a ceramic substrate for measuring temperature, and heating the temperature-measuring element with an additional platinum thin-film resistor.

A flow sensor element comprising a temperature-measuring element and a heating element arranged set apart from each other on a carrier element, wherein the temperature-measuring element comprises two platinum thin-film resistors on a ceramic substrate, and one of the two resistors has a resistance value that is a multiple of a resistance value of the other of the two resistors.

A Flow sensor element comprising a temperature-measuring element and a heating element fixed set apart from each other in an opening of a cover or a hollow body surface, wherein the temperature-measuring element comprises two platinum thin-film resistors on a ceramic substrate, and one of the two resistors has a resistance value that is a multiple of a resistance value of the other of the two resistors.

A method for producing an anemometric measurement device of a flow sensor, the anemometric measurement device comprising at least two film resistors and a cover or a hollow body, the method comprising providing at least two film resistors having resistance values differing by one to two orders of magnitude, placing the at least two film resistors in separate openings of the cover or the hollow body, and fixing the resistors in the respective openings.

A measurement device of a flow sensor, comprising film resistors each including a carrier element having an electrically insulating surface and a structured resistive film films arranged on the surface in at least one opening of a cover or a hollow body end side, wherein the film resistors are fixed in the at least one opening, and wherein two film resistors have resistance values differing by one to three orders of magnitude.

A method for self-cleaning an anemometric measurement device of a flow sensor, the anemometric measurement device comprising a temperature-measuring element and a heating element set in a carrier element, the method comprising providing the temperature-measuring element with a platinum thin-film resistor on a ceramic substrate for measuring temperature and heating the temperature-measuring element with an additional platinum thin-film resistor.