Method of manufacturing a liquid transporting apparatus
AssigneeBrother Kogyo Kabushiki Kaisha
InventorHiroto Sugahara
Life of this patent
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Abstract
A method of manufacturing an ink-jet head according to the present invention includes a step of providing a vibration plate in which grooves associated with respective pressure chambers are formed on a surface of the vibration plate, and a piezoelectric layer forming step of forming a piezoelectric layer by depositing particles of a piezoelectric material on the surface of the vibration plate on an opposite side of a channel unit. Since grooves corresponding to the grooves in the vibration plate are formed also in the piezoelectric layer, it is possible to reduce a cross talk between operating sections of the piezoelectric layer. Further, chip and crack is hardly developed in the piezoelectric layer.
Claims12
A method of manufacturing a liquid transporting apparatus including a channel unit in which a plurality of pressure chambers communicating with a discharge port which discharges a liquid are arranged along a flat surface;
- and a piezoelectric actuator which includes a vibration plate which is joined to one surface of the channel unit to cover the pressure chambers, and a piezoelectric layer formed of a piezoelectric material, and which changes selectively a volume of the pressure chambers, the method comprising:
- a step of providing, on the channel unit, a plate to be a vibration plate, the plate having grooves formed on a surface thereof, the grooves being associated with the respective pressure chambers;
- and
- a piezoelectric layer forming step of forming the piezoelectric layer by depositing particles of a piezoelectric material on the surface of the vibration plate on which the grooves have been formed, the particles of the piezoelectric material being deposited on a surface of the grooves such that the particles of the piezoelectric material are in contact with the surface of the grooves, wherein the piezoelectric layer on surfaces of the grooves is formed to be thinner than the piezoelectric layer in an area other than the surfaces of the grooves.
Dependencies are inferred from the claim text.